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Kwangho Ahn
at Micron Technology Inc
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Publications (1)
Proceedings Article | 12 November 2024 Paper
Enhanced EUV photolithography control for overcoming defectivity challenges
Amit Ohri, Steve Snyder, Vineet Vijayakrishnan Nair, Brian Watson, Kwangho Ahn, Efe Sinan Ege, Yashvi Singh, Ethan Lee, Howard Chen, Scott Light, Josiah Jebaraj Johnley Muthuraj, Lishan Chen, Kevin Weich, John Hobbs
Proceedings Volume 13215, 132150P (2024) https://doi.org/10.1117/12.3034557
KEYWORDS: Optical lithography, Semiconducting wafers, Extreme ultraviolet, Nozzles, Advanced patterning, Inspection, Silicon, Etching, Photoresist processing, Manufacturing
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