Mr. Kazunori Taguchi Profile

Kazunori Taguchi

at Zeon Corp

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Author

Publications (3)

Proceedings Article | 9 April 2024 Presentation + Paper

Main chain scission resists towards high-NA EUV lithography

Akihide Shirotori, Yuji Oda, Rui Zhang, Kazunori Taguchi, Nobuhiro Sato, Sin Fu Yeh , Hyo Seon Suh, Danilo De Simone, Geert Vandenberghe, Hideaki Sanuki

Proceedings Volume 12957, 129570P (2024) https://doi.org/10.1117/12.3009737

KEYWORDS: Extreme ultraviolet lithography, Lithography, Polymers, Extreme ultraviolet, Film thickness, Etching, Electron beam lithography, Optical lithography, Photoresist materials, Critical dimension metrology

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Proceedings Article | 21 November 2023 Poster + Paper

Update on main chain scission resists in Zeon for high-NA EUV lithography

Akihide Shirotori, Yuji Oda, Kazunori Taguchi, Sin Fu Yeh, Hyo Seon Suh, Danilo De Simone, Geert Vandenberghe, Hideaki Sanuki

Proceedings Volume 12750, 127500U (2023) https://doi.org/10.1117/12.2686602

KEYWORDS: Extreme ultraviolet lithography, Electron beam lithography, Polymers, Lithography, Stochastic processes, Scanners, Printing, High volume manufacturing, Extreme ultraviolet, Polymer thin films

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Proceedings Article | 26 September 2019 Paper

Strategy for the breakthrough of RLS trade-off relationship in the development of novel resist materials and a developer

Ayako Nakajima, Manabu Hoshino, Kazunori Taguchi, Takahiro Kozawa

Proceedings Volume 11148, 1114814 (2019) https://doi.org/10.1117/12.2536526

KEYWORDS: Fluorine, Chemical species, Scanning electron microscopy, Lithography, Optical lithography, Absorption, Carbon

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