Prof. Karen J. Nordheden Profile

Prof. Karen J. Nordheden

at Univ of Kansas

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 12 February 2009 Paper

Karen Nordheden, Bogdan Pathak, John Alexander

Proceedings Volume 7217, 72170Q (2009) https://doi.org/10.1117/12.817016

KEYWORDS: Etching, Zinc oxide, Plasma, Anisotropic etching, Reactive ion etching, Gases, Plasma etching, Gallium arsenide, Silica, Chemistry

Proceedings Article | 20 February 2007 Paper

Karen Nordheden, Mark Dineen, Colin Welch

Proceedings Volume 6474, 64740P (2007) https://doi.org/10.1117/12.714048

KEYWORDS: Etching, Zinc oxide, Plasma, Plasma etching, Scanning electron microscopy, Plasma systems, Gases, Ions, Silicon, Photoresist materials

Proceedings Article | 6 July 2004 Paper

Karen Nordheden

Proceedings Volume 5359, (2004) https://doi.org/10.1117/12.531391

KEYWORDS: Etching, Chlorine, Argon, Zinc oxide, Chemistry, Plasma, Plasma etching, Zinc, Ions, Surface roughness

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Keywords/Phrases