Dr. Juha T. Rantala
SPIE Involvement:
Author
Publications (30)

Proceedings Article | 9 April 2024 Presentation + Paper
Luong Nguyen Dang, Li-Ting Tseng, Anil Rajak, Thomas Gädda, Markus Laukkanen, Jagadish Salunke, Shima Moosakkani, Jyri Paulasaari, Juha Rantala, Michaela Vockenhuber, Dimitrios Kazazis, Yasin Ekinci
Proceedings Volume 12957, 129570I (2024) https://doi.org/10.1117/12.3014297
KEYWORDS: Electron beam lithography, Solubility, Extreme ultraviolet, Extreme ultraviolet lithography, Silicon, Polymers, Line width roughness, Photoresist materials, Lithography, Spin on carbon materials

Proceedings Article | 21 March 2022 Presentation
Proceedings Volume 11932, 1193220 (2022) https://doi.org/10.1117/12.2635329

Proceedings Article | 30 March 2021 Presentation
Proceedings Volume 11764, 117640H (2021) https://doi.org/10.1117/12.2597462

Proceedings Article | 5 March 2021 Presentation + Paper
Jyri Paulasaari, Juha Rantala, Jukka Perento, Janne Kylmä, Mikko Poutanen
Proceedings Volume 11682, 116820A (2021) https://doi.org/10.1117/12.2578747
KEYWORDS: Coating, Refractive index, Thin films, Integrated optics, Air contamination, Waveguides, Transmittance, Sensors, Scattering, Particles

Proceedings Article | 25 March 2019 Paper
Thomas Gädda, Nguyen Dang Luong, Markus Laukkanen, Kimmo Karaste, Oskari Kähkönen, Emilia Kauppi, Dimitrios Kazazis, Yasin Ekinci, Juha Rantala
Proceedings Volume 10960, 109600B (2019) https://doi.org/10.1117/12.2515600
KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Polymers, Electron beam lithography, Line width roughness, Silicon, Line edge roughness, Optical lithography, Coating, Scanning electron microscopy

Proceedings Article | 11 October 2018 Paper
Juha Rantala, Thomas Gädda, Markus Laukkanen, Luong Nguyen Dang, Kimmo Karaste, Dimitrios Kazazis, Yasin Ekinci
Proceedings Volume 10809, 108090X (2018) https://doi.org/10.1117/12.2503107
KEYWORDS: Extreme ultraviolet lithography, Etching, Extreme ultraviolet, Electron beam lithography, System on a chip, Coating, Silicon, Line edge roughness, Metals, Line width roughness

Proceedings Article | 25 April 2008 Paper
Hai Reznik, Ruth Shima Edelstein, Michal Shach-Caplan, Fabian Dulberg, Vladimir Kamenetsky, Kimmo Karaste, Juha Rantala
Proceedings Volume 7001, 70010C (2008) https://doi.org/10.1117/12.786380
KEYWORDS: Thin film coatings, Refractive index, Dielectrics, Microlens, Image sensors, Waveguides, FT-IR spectroscopy, Polymers, Etching, Semiconducting wafers

Proceedings Article | 28 May 2004 Paper
Terho Kololuoma, Jussi Hiltunen, Markus Tuomikoski, Jyrki Lappalainen, Juha Rantala
Proceedings Volume 5355, (2004) https://doi.org/10.1117/12.528803
KEYWORDS: Thin films, Sol-gels, Crystals, Electro optics, Metals, Ferroelectric materials, Fabrication, Zirconium, Refractive index, Electron beam lithography

SPIE Journal Paper | 1 December 2002
OE, Vol. 41, Issue 12, (December 2002) https://doi.org/10.1117/12.10.1117/1.1518993
KEYWORDS: Axicons, Ultraviolet radiation, Optical components, Diffraction, Chemical elements, Diffraction gratings, Sol-gels, Collimation, Optical testing, Binary data

Proceedings Article | 23 October 2002 Paper
Terho Kololuoma, Ari Tolonen, Leena-Sisko Johansson, Joseph Campbell, Ari Karkkainen, Marianne Hiltunen, Tomi Haatainen, Juha Rantala
Proceedings Volume 4804, (2002) https://doi.org/10.1117/12.453546
KEYWORDS: Tin, Antimony, Thin films, Crystals, Ions, Sodium, Doping, Metals, Oxides, Coating

Proceedings Article | 10 June 2002 Paper
Proceedings Volume 4647, (2002) https://doi.org/10.1117/12.469820
KEYWORDS: Axicons, Optical components, Sol-gels, Diffraction, Chemical elements, Binary data, Semiconductor lasers, Optical design, Collimation, Hybrid optics

SPIE Journal Paper | 1 April 2002
Mikko Karppinen, Kari Kataja, Jukka-Tapani Maekinen, Sanna Aikio, Hannu Rajaniemi, Pertti Paeaekkoenen, Jari Turunen, Juha Rantala, Pentti Karioja
OE, Vol. 41, Issue 04, (April 2002) https://doi.org/10.1117/12.10.1117/1.1456538
KEYWORDS: Transmitters, Sensors, Monte Carlo methods, Scattering, Receivers, Vertical cavity surface emitting lasers, Computer simulations, Diffraction, Ray tracing, Data modeling

Proceedings Article | 13 December 2001 Paper
Proceedings Volume 4455, (2001) https://doi.org/10.1117/12.450449
KEYWORDS: Glasses, Photomasks, Optical lithography, Binary data, Surface roughness, Absorbance, Refractive index, Chemical elements, Mercury, Ultraviolet radiation

Proceedings Article | 15 May 2001 Paper
Ari Kaerkkaeinen, Juha Rantala, Maurice Jabbour, Chen Liang, Robert Bedford, Nasser Peyghambarian, Michael Descour, Ghassan Jabbour
Proceedings Volume 4284, (2001) https://doi.org/10.1117/12.426861
KEYWORDS: Organic light emitting diodes, Light sources, Optical components, Photomasks, Chemical elements, Microscopes, Silicon, Electrodes, Glasses, Semiconducting wafers

Proceedings Article | 15 May 2001 Paper
Proceedings Volume 4284, (2001) https://doi.org/10.1117/12.426858
KEYWORDS: Glasses, Ultraviolet radiation, Diffraction gratings, Diffraction, Sol-gels, Photomasks, Surface roughness, Information operations, Refractive index, Oxides

Proceedings Article | 15 May 2001 Paper
Proceedings Volume 4284, (2001) https://doi.org/10.1117/12.426863
KEYWORDS: Systems modeling, Ray tracing, Sensors, Waveguides, Chemical fiber sensors, Scattering, Light scattering, Silicon, Microscopes, Mirrors

Proceedings Article | 15 May 2001 Paper
Proceedings Volume 4284, (2001) https://doi.org/10.1117/12.426862
KEYWORDS: Organic light emitting diodes, Electroluminescence, Telescopic pixel displays, Polymers, Excitons, Electron transport, Organic materials, Quantum efficiency, Integrated optics, Luminescence

Proceedings Article | 1 September 2000 Paper
Proceedings Volume 4075, (2000) https://doi.org/10.1117/12.397926
KEYWORDS: Semiconductor lasers, Fiber lasers, Optical components, Glasses, Mirrors, Silicon, Reflectivity, Tunable lasers, Packaging, Optical alignment

Proceedings Article | 17 May 2000 Paper
Proceedings Volume 3941, (2000) https://doi.org/10.1117/12.385420
KEYWORDS: Sol-gels, Glasses, Plasma treatment, Thin films, Thin film coatings, Chemistry, Argon, Metals, Semiconductors, Plasma

Proceedings Article | 2 May 2000 Paper
Ari Karkkainen, Osmo Hormi, Juha Rantala
Proceedings Volume 3943, (2000) https://doi.org/10.1117/12.384338
KEYWORDS: Molecules, Luminescence, Electroluminescence, Sol-gels, Printed circuit board testing, Oxides, Silicon, Crystals, Electron transport, Silica

Proceedings Article | 2 May 2000 Paper
Terho Kololuoma, Seppo Nissilae, Juha Rantala
Proceedings Volume 3943, (2000) https://doi.org/10.1117/12.384346
KEYWORDS: Coating, Polymers, Sol-gels, Thin films, Polymethylmethacrylate, Transmittance, Polymer thin films, Glasses, Soda-lime glass, Particles

Proceedings Article | 2 May 2000 Paper
Proceedings Volume 3943, (2000) https://doi.org/10.1117/12.384322
KEYWORDS: Optical components, Sol-gels, Glasses, Silicon, Optical mounts, Ultraviolet radiation, Surface roughness, Photomasks, Etching, Lithography

Proceedings Article | 10 March 2000 Paper
Kari Kataja, Pertti Paakkonen, Jari Turunen, Juha Rantala, Pentti Karioja
Proceedings Volume 3951, (2000) https://doi.org/10.1117/12.379355
KEYWORDS: Diffraction, Vertical cavity surface emitting lasers, Chemical elements, Diffractive optical elements, Transmitters, Beam shaping, Sensors, Data transmission, CCD cameras, Binary data

Proceedings Article | 31 August 1999 Paper
Raviv Levy, Michael Descour, Randy Shul, Christi Willison, Mial Warren, Terho Kololuoma, Juha Rantala
Proceedings Volume 3879, (1999) https://doi.org/10.1117/12.360521
KEYWORDS: Optical components, Silicon, Ray tracing, Semiconducting wafers, Photonics, Systems modeling, Optical benches, Photomasks, Sol-gels, Optical alignment

Proceedings Article | 1 April 1999 Paper
Gualtiero Nunzi Conti, Pekka Ayras, C. Cavaliere, Bor-Chyuan Hwang, Tao Luo, Juha Rantala, Shibin Jiang, Seppo Honkanen, Nasser Peyghambarian
Proceedings Volume 3622, (1999) https://doi.org/10.1117/12.344501
KEYWORDS: Waveguides, Glasses, Sol-gels, Amplifiers, Diffusion, Absorption, Signal attenuation, Optical amplifiers, Erbium, Optical lithography

Proceedings Article | 1 April 1999 Paper
Juha Rantala, Seppo Honkanen, Nasser Peyghambarian
Proceedings Volume 3622, (1999) https://doi.org/10.1117/12.344509
KEYWORDS: Glasses, Sol-gels, Erbium, Waveguides, Optical amplifiers, Oxides, Ions, Silicon, Aluminum, Silica

Proceedings Article | 26 March 1999 Paper
Juha Rantala, Pekka Ayras, Raviv Levy, Michael Descour, Seppo Honkanen, Nasser Peyghambarian
Proceedings Volume 3620, (1999) https://doi.org/10.1117/12.343732
KEYWORDS: Sol-gels, Diffraction, Glasses, Modulation, Lenses, Surface roughness, Silicon, Ultraviolet radiation, Binary data, Thin films

Proceedings Article | 26 March 1999 Paper
Terho Kololuoma, Juha Rantala, Jouko Vaehaekangas, Risto Laitinen
Proceedings Volume 3620, (1999) https://doi.org/10.1117/12.343723
KEYWORDS: Tin, Antimony, Coating, Scanning electron microscopy, Doping, Thin films, Resistance, Optical lithography, Sol-gels, Optical properties

Proceedings Article | 6 July 1998 Paper
Juha Rantala, R. Scott Penner, Seppo Honkanen, Nina Nordman, Olli Nordman, Jouko Vaehaekangas, Mahmoud Fallahi, Nasser Peyghambarian
Proceedings Volume 3469, (1998) https://doi.org/10.1117/12.312923
KEYWORDS: Sol-gels, Waveguides, Glasses, Electron beams, Chemical elements, Fiber Bragg gratings, Lithography, Etching, Fabrication, Optical components

Proceedings Article | 4 April 1997 Paper
Datong Wu, Antonio Salerno, J. Sembach, Xavier Maldague, Juha Rantala, Gerhard Busse
Proceedings Volume 3056, (1997) https://doi.org/10.1117/12.271647
KEYWORDS: Thermography, Inspection, Particles, Skin, Modulation, Lamps, Infrared imaging, Infrared cameras, Infrared radiation, Defect detection

Showing 5 of 30 publications
Proceedings Volume Editor (3)

Conference Committee Involvement (8)
Silicon Photonics and Photonic Integrated Circuits
12 April 2010 | Brussels, Belgium
Silicon Photonics and Photonic Integrated Circuits
7 April 2008 | Strasbourg, France
Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits
3 April 2006 | Strasbourg, France
Integrated Optics and Photonic Integrated Circuits
27 April 2004 | Strasbourg, France
Emerging Optoelectronic Applications
26 January 2004 | San Jose, CA, United States
Functional Integration of Opto-Electro-Mechanical Devices and Systems II
24 January 2002 | San Jose, California, United States
Photonic Materials and Devices
18 September 2001 | Tucson, AZ, United States
Functional Integration of Opto-Electro-Mechanical Devices and Systems
24 January 2001 | San Jose, CA, United States
Showing 5 of 8 Conference Committees
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