We have implemented a hyperbolic metamaterial covering a spectral bandwidth of 2000 inverse cm for wavelengths above 4.7 µm. A stack of intercalated heavily-doped InAs and undoped InAs epilayers was grown by molecular beam epitaxy with tellurium as the n-type dopant for obtaining electron concentrations of ~8e19 per cubic cm. The Type II hyperbolicity was determined through the effective optical constants deduced from infrared ellipsometry measurements of the stacks. The materials were then dry etched to form ID gratings with features ranging from 1 to 5 µm. The effective optical constants were used to model the grating’s optical response by finite element electromagnetic calculations. The models showed the formation of hyperbolic plasmon polaritons at the same frequencies where experimental features were observed.
This material is based upon work supported by the Office of the Undersecretary of Defense for Research and Engineering Basic Research Office STTR under Contract No. W911NF-21-P-0024. Disclaimer: The content of the information does not necessarily reflect the position or the policy of the Government, and no official endorsement should be inferred.
Resonant cavity infrared detectors (RCIDs) can reduce the noise in sensing a laser signal by strongly suppressing background photocurrent at wavelengths outside the narrow spectral band of interest. We recently reported an RCID with 100-nm-thick InAsSb/InAs absorber, GaAs/AlGaAs bottom mirror, and Ge/SiO2 top mirror. At T = 300 K, the external quantum efficiency reached 58% atλres ≈ 4.6 μm, with linewidth δλ = 27 nm. The characteristics at 125 K implied a specific detectivity of 5.5 × 1012 cm Hz½/W, which is more than 3× higher than for a state-of-the-art broadband HgCdTe device operating at that temperature. However, a prominent variation with mesa diameter of the deposited Ge spacer thickness made it difficult to predictably control λres for devices processed with a given diameter. This has been addressed by measuring the reflectivity spectrum following deposition of the spacer, so that thicknesses of the top mirror’s SiO2 and Ge layers could be adjusted appropriately to attain a targeted resonance. This was especially beneficial in matching the λres for a small mesa, needed to minimize the capacitance in high-frequency measurements, to the emission wavelength of a given ewquantum cascade laser.
For some applications, resonant cavity infrared detectors (RCIDs) offer advantages over traditional broadband photodetectors. The addition of a resonant cavity allows for higher external quantum efficiency (EQE), faster response time, and narrower spectral response for enhanced selectivity. Recently, the US Naval Research Laboratory demonstrated RCIDs with EQE of 34% and D∗ of 7 × 109 at room temperature, centered at 4.0 μm (46 nm FWHM). Princeton University has demonstrated that these RCIDs can detect gas-phase nitrous oxide (N2O) at room temperature with only a broadband light source and no other optical components. The results imply that a simple RCID-LED pair manufactured on a semiconductor wafer would provide a viable gas sensor. The manufacturing process could be completely automated, resulting in mass-producible optical gas sensors. Progress has been made for developing RCIDs at other wavelengths. Based on the achieved detection limit of 4% N2O at 4.0 μm, with 3 cm path length, leak detection of percentage-level concentrations of gases is definitely viable. The potential for operating at a more optimal wavelength to attain high-precision measurements at part-per-million (ppm) levels is still under investigation.
In this paper, we present findings on micro-concentrator photovoltaic cells composed of lattice matched subcells grown on GaAs and InP substrates, which are stacked into single, four-terminal devices using micro-transfer printing. The design, modeling, growth, fabrication and assembly of the devices will be described, and potential interconnection schemes to achieve efficient, two-terminal strings of cells with flexible current and voltage outputs and resilience to defects is discussed.
Jill Nolde, Eric Jackson, Mijin Kim, Chul Soo Kim, Chadwick Canedy, Michael Warren, Stephanie Tomasulo, Chaffra Affouda, Erin Cleveland, Igor Vurgaftman, Jerry Meyer, Edward Aifer
For diffusion-limited nBn detectors, using an absorption layer much thinner than the optical attenuation length and minority carrier diffusion length can improve the dark current to provide greater sensitivity or higher temperature operation. However, if the quantum efficiency (QE) also decreases with absorber thickness, the advantage of reduced dark current is eliminated. We discuss the use of a metallic grating to couple the incident light into laterally propagating surface plasmon polariton (SPP) modes and increase the effective absorption length. We fabricate the gratings using a deposited Ge layer, which provides a uniform profile without increasing the dark current. Using this process in conjunction with a 0.5-μm-thick InAsSb absorber lattice-matched to GaSb, we demonstrate an external QE of 34% for T = 78 to 240 K. An nBn structure with an InAs0.8Sb0.2 absorber that is grown metamorphically on GaSb using a step-graded InGaSb buffer has a peak external QE of 39% at 100 K, which decreases to 32% by 240 K. Finally, we demonstrate that a grating with SPP resonance near the bandgap extends the absorption band and can potentially reduce the dark current by another factor of 3 to 8 times in addition to the 5 × reduction due to the thinner absorber.
We report resonant-cavity infrared detectors with absorbers that consist of only five quantum wells, but exhibiting 34% external quantum efficiency at room temperature at the resonant wavelength of 4.0 μm. The FWHM linewidth is 46 nm, and the peak absorption is enhanced by nearly a factor of 30 over that for a single pass through the absorber. Although the Shockley-Read lifetime in the current material is much shorter than the state of the art, the dark current density is at the level of HgCdTe detectors as quantified by “Rule 07”. The Johnson-noise limited detectivity (D*) at 21°C is 7 × 109 cm Hz½/W. We expect that future improvements in the device design and material quality will lead to higher quantum efficiency, as well as a significant reduction of the dark current density consistent with the very thin absorber.
For diffusion limited nBn detectors, using an absorption layer much thinner than the optical attenuation length and minority carrier diffusion length can improve the dark current. As the absorber thickness decreases, the lower dark current increases the signal-to-noise ratio to provide greater sensitivity or higher temperature operation. However, if the quantum efficiency (QE) also decreases with absorber thickness, the advantage of reduced dark current is eliminated. Here we discuss the use of a metallic grating to couple the incident light into laterally-propagating surface plasmon polariton (SPP) modes, so as to increase the effective absorption length. We fabricate the gratings using a deposited Ge layer, which provides a uniform grating profile without increasing the dark current. Using this process in conjunction with a 0.5 μm-thick InAsSb absorber lattice-matched to GaSb, we demonstrate an external QE of 34% for T = 78–240 K. An nBn structure with an InAs0.8Sb0.2 absorber that is grown metamorphically on GaSb using a step-graded InGaSb buffer has a peak external QE of 39% at 100 K, which decreases to 32% by 240 K. Finally, we demonstrate that a grating with SPP resonance near the bandgap extends the absorption band, and can potentially reduce the dark current by a factor of 3–8 in addition to the 5× reduction due to the thinner absorber.
We discuss the current performance of long-wavelength infrared photodetectors based on type-II superlattices, and the projected characteristics for diffusion-limited operation. For optimized architectures such as graded-gap and abrupt-heterojunction designs, the dark currents are strongly dominated by Shockley-Read (SR) rather than Auger processes. A factor of 10 improvement over the demonstrated SR lifetimes would lead to a factor of 4 lower dark current than state-of-the-art HgCdTe devices.
In order to be commercially viable, the type-II superlattice (T2SL) LWIR focal plane array technology will require the
development of effective passivation of exposed surfaces. Here we investigate the relationship between the thickness
and composition of the native oxide at the T2SL-SiO2 interface and the diode performance in terms of sidewall
resistivity. Device performance is compared between samples with untreated surfaces, those for which the native oxides
have been removed at various intervals prior to SiO2 deposition, and samples for which oxide growth was promoted by
ozone exposure with and without a prior oxide strip. InAs- and GaSb-capped pieces were processed in an identical
manner and studied using X-ray photoelectron spectroscopy (XPS). From these spectra, the compositions and
thicknesses of the surface oxides just prior to SiO2 deposition were determined, complementing the electrical
characterization of devices. Correlation of the performance and surface composition is presented.
Ga(In)Sb/InAs-based strained-layer superlattices (SLS) have received considerable attention recently for their potential
in infrared (IR) applications. These heterostructures create a type-II band alignment such that the conduction band of
InAs layer is lower than the valence band of Ga(In)Sb layer. By varying the thickness and composition of the constituent
materials, the bandgap of these SLS structures can be tailored to cover a wide range of the mid-wave and long-wave
infrared (MWIR and LWIR) absorption bands. Suppression of Auger recombination and reduction of tunneling current
can also be realized through careful design of the Type-II band structure.
The growth of high-quality Ga(In)Sb/InAs-based SLS epiwafers is challenging due to the complexity of growing a large
number of alternating thin layers with mixed group V elements. In this paper, the development of a manufacturable
growth process by molecular beam epitaxy (MBE) using a multi-wafer production reactor will be discussed. Various
techniques were used to analyze the quality of the epitaxial material. Structural properties were evaluated by
high-resolution x-ray diffraction (XRD) and cross-sectional transmission electron microscopy (XTEM). Optical
properties were assessed by low-temperature photoluminescence measurements (PL). Surface morphology and
roughness data as measured by Nomarski optical microscope and atomic force microscope (AFM) will be presented.
Device characteristics such as dynamic impedance, responsivity, quantum efficiency, and J-V characteristics of
photodiodes fabricated using our SLS epiwafers will be discussed.
Much has been accomplished in the last few years in advancing the performance of type-II superlattice (T2SL) based
infrared photodiodes, largely by focusing on device and heterostructure design. Quantum efficiency (QE) has increased
to 50% and higher by using thicker absorbing layers and making use of internal reflections, and dark currents have been
reduced by over a factor of ten by using bandstructure engineering to suppress tunneling and generation-recombination
(G-R) currents associated with the junction. With performance levels of LWIR T2SL photodiodes now within an order of
magnitude of that of HgCdTe (MCT) based technology, however, there is renewed interest in understanding fundamental
materials issues. This is needed both to move performance toward the theoretical Auger limit, and to facilitate the task of
transitioning T2SL growth from laboratories to commercial institutions. Here we discuss recent continuing efforts at
NRL to develop new device structures for enhanced detector performance, and to further our understanding of this
material system using advanced structural and electronic probes. Results from electron beam induced current (EBIC)
imaging and analysis of point defects in T2SL photodiodes will be presented, showing differentiated behavior of bulk
defect structures. We will also describe a study comparing intended vs. as-grown T2SL photodiode structures by crosssectional
scanning microscopy (XSTM). Using parameters extracted from the XSTM images, we obtain detailed
knowledge of the composition and layer structures through simulation of the x-ray diffraction spectra.
Type-II strained layer superlattices (SLS) are a rapidly maturing technology for infrared imaging applications,
with performance approaching that of HgCdTe1,2,3,4. Teledyne Imaging Sensors (TIS), in partnership with the
Naval Research Laboratory (NRL), has recently demonstrated state-of-the-art, LWIR, SLS 256 × 256 focal
plane arrays (FPAs) with cutoff wavelengths ranging from 9.4 to 11.5 μm. The dark current performance of
these arrays is within a factor of 10-20 of (state-of-the-art) HgCdTe. Dark current characteristics of
unpassivated and passivated devices exhibit bulk-limited behavior, essential for FPA applications. TIS has
also demonstrated rapid substrate thinning processes for increased infrared transmission through the GaSb
substrate. In addition to this work, this presentation will discuss the recent developments of 1K x 1K LWIR
SLS FPAs.
Electrically-pumped photonic-crystal distributed-feedback lasers with interband-cascade active regions operating in
single spectral mode at 3.3 μm are demonstrated. At 78 K, a stripe of width 400 μm emits up to 67 mW of cw power
into a single spectral mode with side-mode suppression ratio ≈ 27 dB. The full-width at half-maximum of the farfield
divergence angle is ≈ 0.5°, which combined with the near-field profile yields an effective M2 of 1.7-2.0.
Recent advances in the development of mid-IR antimonide type-II "W" interband cascade lasers have led to a
considerably improved high-temperature operation of the devices. We report an experimental investigation of four
interband cascade lasers with wavelengths spanning the mid-infrared spectral range, i.e., 2.9-5.2 μm near room
temperature in pulsed mode. One broad-area device had a pulsed threshold current density of only 3.8 A/cm at 78 K
(λ = 3.6 μm) and 590 A/cm2 at 300 K (λ = 4.1 μm). The room-temperature threshold for the shortest-wavelength
device (λ = 2.6-2.9 μm) was even lower, 450 A/cm2. A cavity-length study of the lasers emitting at 3.6-4.1 μm
yielded an internal loss varying from 7.8 cm-1 at 78 K to 24 cm-1 at 300 K, accompanied by a decrease of the internal
efficiency from 77% to 45%. Preliminary cw testing led to a narrow-ridge device from one of the wafers with
emission at λ = 4.1 μm operating to 288 K, a new record for interband devices in this wavelength range.
Biosensors rely on optical techniques to obtain high sensitivity and speed, but almost all biochips still require external light sources, optics, and detectors, which limits the widespread use of these devices. The optoelectronics technology base now allows monolithic integration of versatile optical sources, novel sensing geometries, filters, spectrometers, and detectors, enabling highly integrated chip-scale sensors. We discuss biophotonic integrated circuits built on both GaAs and InP substrates, incorporating widely tunable lasers, novel evanescent field sensing waveguides, heterodyne spectrometers, and waveguide photodetectors, suitable for high sensitivity transduction of affinity assays.
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