To overcome the accuracy limitation due to the aberration of reference wavefront in the interferometer testing, the point diffraction interferometer (PDI) uses the pinhole to create an ideal diffraction sphere wavefront as the reference wavefront. Because the perfect pinhole is hard to manufacture, then the imperfect pinhole will cause the wavefront errors which will influence the test accuracy. In this paper we use the absolute testing method to test the wave front of the pinhole. Then the testing accuracy of point diffraction interferometer can be improved by subtracting the error of the pinhole. In this paper a Phase-shifting point diffraction interferometer system is designed to testing the pinhole. We use three pinholes to test each other. According the algorithm of the absolute testing method, we can calculate the wavefront error of the pinhole. Then the testing accuracy of point diffraction interferometer can be improved by subtracting the error of the pinhole.
The projection objectives,used in modern projection lithography, such as deep-ultraviolet lithography (DUVL), or
extreme-ultraviolet lithography (EUVL), desire very high-quality optics. It has placed stringent requirements on the
accuracy of the interferometers used for optical metrology. Point diffraction interferometry, which generates a spherical
reference wave front by pinhole diffraction, has been developed to meet this need. In order to estimate the measurement
accuracy, several scalar wave diffraction methods have been used when the diameter of the pinhole is much larger than
the wavelength. However, while the diameter keeps decreasing, ultimately to the order of the wavelength, it is obviously
not appropriate to calculate in the same way. So, a three-dimensional (3-D) electromagnetic field simulation, based on
Finite Element Method (FEM), is set up to study the propagation of the visible- light, 632.8 nm wavelength, through sub-
1000nm diameter pinholes in a chromium membrane. Deviations have been calculated to predict the accuracy, between
perfect sphere and the wave front, diffracted by a series of pinholes with different diameters.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.