Mr. Jia Hung Chang Profile

Jia Hung Chang

at United Microelectronics Corp

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Publications (3)

Proceedings Article | 22 February 2021 Presentation + Paper

Innovative dual mark design for alignment verification and process monitoring in advanced lithography

Jia Hung Chang, En Chuan Lio, Junjin Lin, Tang Chun Weng, Bill Lin, Patrick Lomtscher, Martin Freitag, Stefan Buhl, Hsiao Lin Hsu, Rex Liu

Proceedings Volume 11613, 116130K (2021) https://doi.org/10.1117/12.2583620

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Proceedings Article | 13 March 2018 Paper

Higher order intra-field alignment for intra-wafer lens and reticle heating control

Charlie Chen, En-Chuan Lio, Hsiao Lin Hsu, Jia Hung Chang, Sho Shen Lee, Patrick Lomtscher, Boris Habets, Georg Erley, Norman Birnstein, Steven Tottewitz, Rex Liu

Proceedings Volume 10585, 105851R (2018) https://doi.org/10.1117/12.2297358

KEYWORDS: Optical alignment, Semiconducting wafers, Reticles, Overlay metrology, Data modeling, Neodymium, HVAC controls, Distortion, Calibration, Roads

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Proceedings Article | 13 March 2018 Paper

Advanced combined overlay and CD uniformity measurement mark for double patterning

Hsiao Lin Hsu, En Chuan Lio, Charlie Chen, Jia Hung Chang, Sho Shen Lee, Stefan Buhl, Manuela Gutsch, Patrick Lomtscher, Martin Freitag, Boris Habets, Rex Liu

Proceedings Volume 10585, 105851H (2018) https://doi.org/10.1117/12.2299299

KEYWORDS: Overlay metrology, Etching, Lithography, Semiconducting wafers, Metrology, Critical dimension metrology, Molybdenum, Information operations, Optical lithography, Double patterning technology

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