Mr. Jeremy R. Godin Profile

Jeremy R. Godin

at Univ of Waterloo

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Author

Publications (2)

Proceedings Article | 7 March 2014 Paper

Use of a hybrid ray-thin film interference model for the optimization of a FTIR FOEWS

J. Godin, P. Nieva

Proceedings Volume 8980, 898008 (2014) https://doi.org/10.1117/12.2040366

KEYWORDS: Cladding, FT-IR spectroscopy, Light emitting diodes, Reflection, Interfaces, Thin films, Sensors, Geometrical optics, LED lighting, Refraction

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Proceedings Article | 15 February 2012 Paper

Effects of dry plasma releasing process parameters and induced in-plane stress on MEMS devices yield

Patricia Nieva, Jeremy Godin, Ryan Norris, Ali Najafi Sohi, Timothy Leung

Proceedings Volume 8250, 825003 (2012) https://doi.org/10.1117/12.910854

KEYWORDS: Microelectromechanical systems, Semiconducting wafers, Etching, Plasma etching, Silicon, Plasma, Plasma enhanced chemical vapor deposition, Silicon films, Nanolithography, Sensors

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