Dr. Jeffry J. Sniegowski Profile

Dr. Jeffry J. Sniegowski

VP Production at Sandia National Labs

SPIE Involvement:

Author

Publications (22)

Proceedings Article | 20 October 2004 Paper

Paper

Development, test, and evaluation of MEMS micromirrors for free-space optical communications

Jeffry Sniegowski, Steven Rodgers, Bradley Boone, Jonathan Bruzzi, Chris Drabenstadt, Bernard Kluga, Eric Rogala, Robert Osiander, Keith Rebello, Margaret Darrin

Proceedings Volume 5550, (2004) https://doi.org/10.1117/12.562819

KEYWORDS: Micromirrors, Mirrors, Microelectromechanical systems, Oxides, Digital signal processing, Transmitters, Space operations, CMOS cameras, Charge-coupled devices, Imaging systems

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SPIE Journal Paper | 1 October 2003 Open Access

Open Access

SURFACE MICROMACHINING

Jeffry Sniegowski, James Smith

JM3, Vol. 2, Issue 04, (October 2003) https://doi.org/10.1117/12.10.1117/1.1616574

Proceedings Article | 30 August 1999 Paper

Paper

Reproducibility data on SUMMiT

Siv Limary, Harold Stewart, Lloyd Irwin, John McBrayer, Jeffry Sniegowski, Stephen Montague, James Smith, Maarten de Boer, Jerome Jakubczak

Proceedings Volume 3874, (1999) https://doi.org/10.1117/12.361210

KEYWORDS: Resistance, Semiconducting wafers, Oxides, Microelectromechanical systems, Etching, Silicon, Scanning electron microscopy, Diagnostics, Computer aided design, Standards development

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Proceedings Article | 30 August 1999 Paper

Paper

W-coating for MEMS

Sita Mani, James Fleming, Jeffry Sniegowski

Proceedings Volume 3874, (1999) https://doi.org/10.1117/12.361215

KEYWORDS: Tungsten, Silicon, Microelectromechanical systems, Coating, Resonators, Oxides, Semiconducting wafers, Photomicroscopy, Chemical vapor deposition, Deposition processes

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Proceedings Article | 13 October 1998 Paper

Paper

Improved polysilicon surface-micromachined micromirror devices using chemical-mechanical polishing

Dale Hetherington, Jeffry Sniegowski

Proceedings Volume 3440, (1998) https://doi.org/10.1117/12.326692

KEYWORDS: Chemical mechanical planarization, Oxides, Micromirrors, Mirrors, Surface finishing, Adaptive optics, Polishing, Photography, Profilometers, Chemical elements

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Proceedings Article | 8 September 1998 Paper

Paper

Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology

James Smith, M. Steven Rodgers, Jeffry Sniegowski, Samuel Miller, Dale Hetherington, Paul McWhorter, Mial Warren

Proceedings Volume 3514, (1998) https://doi.org/10.1117/12.323889

KEYWORDS: Complex systems, Reliability

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Proceedings Article | 31 August 1998 Paper

Paper

Thin Teflon-like films for MEMS: film properties and reliability studies

Bradley Smith, Craig Brown, Glen LaVigne, Jeffry Sniegowski

Proceedings Volume 3511, (1998) https://doi.org/10.1117/12.324289

KEYWORDS: Plasma, Semiconducting wafers, FT-IR spectroscopy, Electrodes, Diffusion, Thin films, Microelectromechanical systems, Water, Reactive ion etching, Silicon

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Proceedings Article | 8 June 1998 Paper

Paper

Comparison of properties of electrical test structures patterned in BESOI and SIMOX films for CD reference-material applications

Richard Allen, Rathindra Ghoshtagore, Michael Cresswell, Loren Linholm, Jeffry Sniegowski

Proceedings Volume 3332, (1998) https://doi.org/10.1117/12.308722

KEYWORDS: Semiconducting wafers, Silicon, Resistance, Oxides, Critical dimension metrology, Resistors, Information operations, Bridges, Metrology, Photomasks

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Proceedings Article | 20 April 1998 Paper

Paper

Combined photonics and MEMS function demonstration

Olga Blum-Spahn, Mial Warren, Hong Hou, Richard Carson, Kent Choquette, M. Steven Rodgers, Jeffry Sniegowski

Proceedings Volume 3286, (1998) https://doi.org/10.1117/12.305469

KEYWORDS: Microelectromechanical systems, Vertical cavity surface emitting lasers, Camera shutters, Photonics, Silicon, Solar cells, Gold, Microsystems, Actuators, Packaging

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Proceedings Article | 5 September 1997 Paper

Paper

Advanced micromechanisms in a multilevel polysilicon technology

M. Steven Rodgers, Jeffry Sniegowski, Samuel Miller, Carole Craig Barron, Paul McWhorter

Proceedings Volume 3224, (1997) https://doi.org/10.1117/12.284507

KEYWORDS: Surface micromachining, Assembly equipment, Optical design, Optical components, Mechanical engineering, Reliability, Mirrors, Camera shutters

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Proceedings Article | 5 September 1997 Paper

Paper

SAMPLE (Sandia agile MEMS prototyping, layout tools, and education)

Carole Craig Barron, Brady Davies, Jeffry Sniegowski, M. Steven Rodgers, John Comtois, M. Adrian Michalicek

Proceedings Volume 3223, (1997) https://doi.org/10.1117/12.284476

KEYWORDS: Microelectromechanical systems, Prototyping, Micromachining, Chemical mechanical planarization, Oxides

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Proceedings Article | 5 September 1997 Paper

Paper

Routes to failure in rotating MEMS devices experiencing sliding friction

Samuel Miller, Glen LaVigne, M. Steven Rodgers, Jeffry Sniegowski, J. Waters, Paul McWhorter

Proceedings Volume 3224, (1997) https://doi.org/10.1117/12.284523

KEYWORDS: Microelectromechanical systems

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Proceedings Article | 2 September 1997 Paper

Paper

SAMPLE (Sandia agile MEMS prototyping, layout tools, and education)

Brady Davies, Carole Craig Barron, Jeffry Sniegowski, M. Steven Rodgers

Proceedings Volume 3226, (1997) https://doi.org/10.1117/12.284568

KEYWORDS: Microelectromechanical systems, Computer aided design, Prototyping, Chemical mechanical planarization, Surface micromachining, Custom fabrication, Manufacturing, Silicon

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Proceedings Article | 23 September 1996 Paper

Paper

Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS

James Smith, Stephen Montague, Jeffry Sniegowski, James Murray, Ronald Manginell, Paul McWhorter, Robert Huber

Proceedings Volume 2879, (1996) https://doi.org/10.1117/12.251218

KEYWORDS: Semiconducting wafers, Microelectromechanical systems, Manufacturing, Resistance, Microelectronics, Hydrogen, Signal processing, Electronics, Platinum, Packaging

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Proceedings Article | 23 September 1996 Paper

Paper

Chemical-mechanical polishing: enhancing the manufacturability of MEMS

Jeffry Sniegowski

Proceedings Volume 2879, (1996) https://doi.org/10.1117/12.251237

KEYWORDS: Chemical mechanical planarization, Microelectromechanical systems, Manufacturing, Surface micromachining, Microelectronics, Semiconducting wafers, Oxides, Sensors, Silicon, Etching

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Proceedings Article | 17 September 1996 Paper

Paper

Performance trade-offs for a surface micromachined microengine

Samuel Miller, Jeffry Sniegowski, Glen LaVigne, Paul McWhorter

Proceedings Volume 2882, (1996) https://doi.org/10.1117/12.250702

KEYWORDS: Performance modeling

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Proceedings Article | 21 May 1996 Paper

Paper

Electrical test structures replicated in silicon-on-insulator material

Michael Cresswell, Jeffry Sniegowski, Rathindra Ghoshtagore, Richard Allen, Loren Linholm, John Villarrubia

Proceedings Volume 2725, (1996) https://doi.org/10.1117/12.240117

KEYWORDS: Silicon, Etching, Semiconducting wafers, Metrology, Photomasks, Crystals, Oxides, Silicon films, Calibration, Optical lithography

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Proceedings Article | 20 May 1996 Paper

Paper

Integrated mold/surface-micromachining process

Carole Craig Barron, James Fleming, Stephen Montague, Jeffry Sniegowski, Dale Hetherington

Proceedings Volume 2722, (1996) https://doi.org/10.1117/12.240455

KEYWORDS: Silicon, Etching, Micromachining, Microelectronics, Surface micromachining, Chemical mechanical planarization, Oxides, Electronics, Microelectromechanical systems, Reactive ion etching

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Proceedings Article | 20 May 1996 Paper

Paper

Friction in surface-micromachined microengines

Samuel Miller, Jeffry Sniegowski, Glen LaVigne, Paul McWhorter

Proceedings Volume 2722, (1996) https://doi.org/10.1117/12.240444

KEYWORDS: Microelectromechanical systems, Reliability, Actuators, Solids, Francium, Data modeling, Systems modeling, Temperature metrology, Dielectrics, Lanthanum

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Proceedings Article | 19 September 1995 Paper

Paper

Material and processing issues for the monolithic integration of microelectronics with surface-micromachined polysilicon sensors and actuators

James Smith, Stephen Montague, Jeffry Sniegowski

Proceedings Volume 2639, (1995) https://doi.org/10.1117/12.221301

KEYWORDS: Tungsten, Microelectronics, Semiconducting wafers, Electronics, Resistance, Aluminum, Diffusion, Manufacturing, Silicon, Tin

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Proceedings Article | 26 May 1995 Paper

Paper

Micromachined sensor and actuator research at the Microelectronics Development Laboratory

James Smith, Carole Craig Barron, James Fleming, Stephen Montague, J. Rodriguez, Bradley Smith, Jeffry Sniegowski

Proceedings Volume 2448, (1995) https://doi.org/10.1117/12.210458

KEYWORDS: Sensors, Actuators, Electronics, Microelectronics, CMOS technology, Surface micromachining, Tungsten, Control systems, Silicon, Hydrogen

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Proceedings Article | 12 May 1995 Paper

Paper

Microfabricated actuators and their application to optics

Jeffry Sniegowski, Ernest Garcia

Proceedings Volume 2383, (1995) https://doi.org/10.1117/12.209053

KEYWORDS: Actuators, Microactuators, Surface micromachining, Etching, Optical components, Microelectromechanical systems, Silicon, Oxides, Photomicroscopy, Capacitors

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Showing 5 of 22 publications

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