Janghwi Lee
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 3 October 2022 Poster + Paper
Akinori Ohkubo, Jiyoung Chu, Janghwi Lee, Sunghwi Cho, Wondon Joo, Sangwoo Bae
Proceedings Volume 12221, 122211B (2022) https://doi.org/10.1117/12.2631007
KEYWORDS: Diagnostics, Image sensors, Sensors, Geometrical optics, Digital micromirror devices, Calibration, CCD image sensors, Maskless lithography, Micromirrors, Wavefront aberrations

Proceedings Article | 20 August 2020 Poster + Paper
Proceedings Volume 11485, 114850N (2020) https://doi.org/10.1117/12.2567116
KEYWORDS: Signal to noise ratio, Polarization, Scattering, Near field, Cameras, Semiconducting wafers, Ellipsometry

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