Jaewhan Sung
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 December 2022 Paper
Proceedings Volume 12293, 1229303 (2022) https://doi.org/10.1117/12.2641750
KEYWORDS: Image processing, Photomasks, Inspection, Extreme ultraviolet, Coating, Image segmentation, Image quality, Etching, Sensors, Optical inspection

Proceedings Article | 12 October 2021 Presentation + Paper
Proceedings Volume 11855, 118550A (2021) https://doi.org/10.1117/12.2599020
KEYWORDS: Particles, Inspection, Photomasks, Digital image processing, Image processing, Sensors, Extreme ultraviolet, Process control, Manufacturing, Plasma

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