Dr. Hyung Joo Lee
Sr. Staff Process Engineer at Lam Research
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 1295526 (2024) https://doi.org/10.1117/12.3009796
KEYWORDS: Advanced process control, Vacuum chambers, Chemical vapor deposition, Manufacturing, Control systems, Film thickness, Data modeling, Metrology, Simulations, Machine learning

Proceedings Article | 10 April 2024 Poster + Paper
Sanghyun Choi, Qian Xie, Nathan Greeneltch, Hyung Joo Lee, Mohan Govindaraj, Srividya Jayaram, Mark Pereira, Sayani Biswas, Samir Bhamidipati, Ilhami Torunoglu
Proceedings Volume 12955, 129553M (2024) https://doi.org/10.1117/12.3012184
KEYWORDS: Education and training, Scanning electron microscopy, Data modeling, Performance modeling, Defect detection, Machine learning, Object detection, Semiconducting wafers, Image analysis, Image quality

Proceedings Article | 27 April 2023 Paper
Proceedings Volume 12496, 124963J (2023) https://doi.org/10.1117/12.2662880
KEYWORDS: Reliability, Semiconducting wafers, Data modeling, Manufacturing, Fabrication, Semiconductors, Industry, High volume manufacturing, Model-based design, Metrology

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