Mr. Hung-Wei Hsu Profile

Hung-Wei Hsu

at National Taiwan Univ

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Publications (1)

Proceedings Article | 27 April 2023 Poster + Paper

Numerical study of electromagnetic properties of the 3D through silicon via with high aspect ratio

Song-En Chen, Chih-Chung Wang, Hung-Wei Hsu, Yen-Ting Wu, Jia-Han Li

Proceedings Volume 12496, 124962J (2023) https://doi.org/10.1117/12.2657818

KEYWORDS: Silicon, Electromagnetism, Reflectometry, Reflection, Finite-difference time-domain method, Reflectance spectroscopy, Semiconducting wafers, Etching

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