Prof. Han Haitjema Profile

Prof. Han Haitjema

Professor at KU Leuven

SPIE Involvement:

Author | Instructor

Area of Expertise:

Metrology , Interferometry

Websites:

Personal Website | Company Website

Proceedings Article | 4 October 2023 Presentation + Paper

Why you should pay attention to international standards in optical metrology

Peter de Groot, Han Haitjema, Mark Malburg

Proceedings Volume 12672, 1267203 (2023) https://doi.org/10.1117/12.2675503

KEYWORDS: Standards development, Equipment, Calibration, Tunable filters, Metrology, Optical surfaces, Optical metrology, Measurement uncertainty, Time metrology, Manufacturing

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Proceedings Article | 18 August 2005 Paper

Accurate roughness measurements by laser interferometer calibration, VFM-uncertainty calculations and noise reduction

H. Haitjema, M. Morel

Proceedings Volume 5879, 58790I (2005) https://doi.org/10.1117/12.614858

KEYWORDS: Calibration, Denoising, Interferometers, Radium, Optical filters, Ranging, Interferometry, Gaussian filters, Safety, Linear filtering

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Proceedings Article | 18 August 2005 Paper

The detection of cyclic nonlinearities in a ZMI2000 heterodyne interferometer

Jorrit Thijsse, Asa Jamting, Nick Brown, Han Haitjema

Proceedings Volume 5879, 58790M (2005) https://doi.org/10.1117/12.625469

KEYWORDS: Interferometers, Beam splitters, Receivers, Heterodyning, Optical testing, Polarization, Transmittance, Aluminum, Signal detection, Lasers

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SPIE Journal Paper | 1 February 2005

Fiber characterization for application in heterodyne laser interferometry, part II: modeling and analysis

Bastiaan Knarren, Suzanne Cosijns, Han Haitjema, Piet Schellekens

OE, Vol. 44, Issue 02, 025003, (February 2005) https://doi.org/10.1117/12.10.1117/1.1839229

KEYWORDS: Polarization, Connectors, Interferometers, Fiber characterization, Polarizers, Heterodyning, Wave plates, Optical engineering, Data modeling, Phase modulation

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SPIE Journal Paper | 1 February 2005

Fiber characterization for application in heterodyne laser interferometry with nanometer uncertainty, part I: polarization state measurements

Bastiaan Knarren, Suzanne Cosijns, Han Haitjema, Piet Schellekens

OE, Vol. 44, Issue 02, 025002, (February 2005) https://doi.org/10.1117/12.10.1117/1.1839228

KEYWORDS: Polarization, Polarizers, Interferometers, Phase modulation, Heterodyning, Fiber characterization, Connectors, Fiber lasers, Optical fibers, Lasers

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Proceedings Article | 26 February 2004 Paper

Scanning wafer thickness and flatness interferometer

Maarten Jansen, Han Haitjema, Peter Schellekens

Proceedings Volume 5252, (2004) https://doi.org/10.1117/12.515650

KEYWORDS: Semiconducting wafers, Interferometers, Calibration, Optical alignment, Distance measurement, Mirrors, Distortion, Phase shifts, Phase measurement, Metrology

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Proceedings Article | 20 November 2003 Paper

Improving a commercially available heterodyne laser interferometer to sub-nm uncertainty

Han Haitjema, Suzanne Cosijns, N. Roset, Maarten Jansen

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.508542

KEYWORDS: Interferometers, Mirrors, Heterodyning, Polarization, Signal detection, Beam splitters, Receivers, Calibration, Optical amplifiers, Phase measurement

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Proceedings Article | 20 November 2003 Paper

Method for approximate noise elimination in form and roughness measurements

Han Haitjema, Michel Morel

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.508550

KEYWORDS: Interference (communication), Spindles, Phase measurement, Calibration, Denoising, Radium, Americium, Wavefronts, Optical testing, Fourier transforms

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Proceedings Article | 22 October 2001 Paper

Uncertainty estimation by the concept of virtual instruments

Han Haitjema, Bas van Dorp, M. Morel, Piet Schellekens

Proceedings Volume 4401, (2001) https://doi.org/10.1117/12.445615

KEYWORDS: Calibration, Monte Carlo methods, Computer simulations, Temperature metrology, Standards development, Radium, Device simulation, Mathematical modeling, Dimensional metrology, Metrology

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Proceedings Article | 22 October 2001 Paper

Virtual CMM using Monte Carlo methods based on frequency content of the error signal

Bas van Dorp, Han Haitjema, Frank Delbressine, Robbert Bergmans, Piet Schellekens

Proceedings Volume 4401, (2001) https://doi.org/10.1117/12.445616

KEYWORDS: Calibration, Monte Carlo methods, 3D modeling, Temperature metrology, Computer simulations, Metrology, Interferometers, Signal generators, 3D metrology, Laser development

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Proceedings Article | 22 October 2001 Paper

Calibration of nanosensors with direct traceability to the meter

Robbert Bergmans, Han Haitjema, Serge Wetzels, Piet Schellekens

Proceedings Volume 4401, (2001) https://doi.org/10.1117/12.445623

KEYWORDS: Sensors, Calibration, Mirrors, Nanosensors, Interferometers, Fabry–Perot interferometry, Beam splitters, Temperature metrology, Laser stabilization, Fabry–Perot interferometers

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Proceedings Article | 22 October 2001 Paper

Novel design of a one-dimensional measurement probe

Rudolf Thalmann, Dannis Brouwer, Han Haitjema, Piet Schellekens

Proceedings Volume 4401, (2001) https://doi.org/10.1117/12.445617

KEYWORDS: Interferometers, Mirrors, Optical spheres, Calibration, Sensors, Transducers, Metrology, Spherical lenses, Reflectors, Mechanical engineering

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Proceedings Article | 30 September 1998 Paper

Ball diameter measuring instrument in a gauge block interferometer

Gerard Kotte, Han Haitjema

Proceedings Volume 3477, (1998) https://doi.org/10.1117/12.323097

KEYWORDS: Interferometers, Calibration, Interferometry, Fringe analysis, Laser stabilization, Temperature metrology, Dimensional metrology, Reflectivity, Metrology, Thermography

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Proceedings Article | 30 September 1998 Paper

Long gauge block measurements based on a Twyman-Green interferometer and three stabilized lasers

Han Haitjema, Gerard Kotte

Proceedings Volume 3477, (1998) https://doi.org/10.1117/12.323121

KEYWORDS: Calibration, Interferometers, Mirrors, Temperature metrology, Sensors, Laser stabilization, Telescopes, Iodine cells, Autocollimators, Humidity

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Proceedings Article | 1 August 1990 Paper

Relations between the optical, electrical, and structural properties of fluorine-doped tin dioxide coatings

Han Haitjema

Proceedings Volume 1272, (1990) https://doi.org/10.1117/12.20453

KEYWORDS: Optical coatings, Fluorine, Crystals, Oxygen, Doping, Scattering, Energy efficiency, Optical properties, Solar energy, X-ray diffraction

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Showing 5 of 15 publications

Conference Committee Involvement (2)

Recent Developments in Traceable Dimensional Measurements III

31 July 2005 | San Diego, California, United States

Recent Developments in Traceable Dimensional Measurements II

4 August 2003 | San Diego, California, United States

Course Instructor

SC562: Accuracy of Interferometric Measurements for Nano-Metrology

This course gives the attendees insight into the physical principles that enable and limit the possibilities of metrology at the nm-uncertainty level. An overview will be given of measurement techniques and principles that are available, with emphasis on their suitability for accurate measurements. Special attention will be given to laser-interferometry. This technique for measuring displacements can be used in several ways as part of a nanometer measuring- or manufacturing device. Another important measuring technique is the measurement of flatness and form deviations by Fizeau or similar interferometers. It will be demonstrated where the limits are and how these can be established for this technique. Examples will be given in the measurement of nanostructures.

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