Dr. Hailiang Lu Profile

Dr. Hailiang Lu

at Shanghai Micro Electronics Equipment Co Ltd

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 10 April 2013 Paper

Sensitivity improvement by a hybrid scatterometer

Hailiang Lu, Fan Wang, Lifeng Duan, Yonghui Chen

Proceedings Volume 8681, 86811M (2013) https://doi.org/10.1117/12.2011472

KEYWORDS: Colorimetry, Spectroscopy, Scatterometry, Microscopes, Polarization, CCD cameras, Metrology, Optical testing, Optical filters, Critical dimension metrology

Read Abstract +

Proceedings Article | 5 April 2012 Paper

Improving the measurement performance of angle-resolved scattermetry by use of pupil optimization

Fan Wang, Qingyun Zhang, Hailiang Lu, Lifeng Duan, Xiaoping Li

Proceedings Volume 8324, 83242M (2012) https://doi.org/10.1117/12.916115

KEYWORDS: Scatterometry, Monte Carlo methods, Sensors, Critical dimension metrology, Process control, Target detection, Signal processing, Spatial light modulators, Lithography, Image sensors

Read Abstract +

Proceedings Article | 5 April 2012 Paper

Diffraction-based overlay measurement on dedicated mark using rigorous modeling method

Hailiang Lu, Fan Wang, Qingyun Zhang, Yonghui Chen, Chang Zhou

Proceedings Volume 8324, 832422 (2012) https://doi.org/10.1117/12.916365

KEYWORDS: Overlay metrology, Diffraction, Scatterometry, Diffraction gratings, Reflectance spectroscopy, Spectroscopy, Scatter measurement, Semiconducting wafers, Reflectometry, Time metrology

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years