Dr. Hafzaliza Erny Zainal Abidin Profile

Dr. Hafzaliza Erny Zainal Abidin

at Univ Kebangsaan Malaysia

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Publications (1)

Proceedings Article | 25 August 2017 Paper

PECVD growth of high quality graphene on interdigital electrodes of MEMS supercapacitor

Hafzaliza Erny Zainal Abidin, Azrul Azlan Hamzah, Mohd Ambri Mohamed, Burhanuddin Yeop Majlis

Proceedings Volume 10349, 1034919 (2017) https://doi.org/10.1117/12.2273729

KEYWORDS: Graphene, Plasma enhanced chemical vapor deposition, Microelectromechanical systems, Raman spectroscopy, Electrodes, Scanning electron microscopy, Electron microscopes, Nanolithography, Coating, Nanostructures

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