Ms. Guicong Wang Profile

Guicong Wang

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Proceedings Article | 6 May 2024 Paper

Sensor bonding surface parting parameter analysis and experiment

Shuai Zhang, Yingjun Li, Guicong Wang, Yazhou Hu

Proceedings Volume 13107, 1310707 (2024) https://doi.org/10.1117/12.3029115

KEYWORDS: Fractal analysis, Sensors, 3D metrology, Analytical research, Data processing

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In this paper, based on the fractal theory, the surface of the sensor split ring is collected and reconstructed and the surface parameters are calculated. The surface topography acquisition test bench is set up, and the surface topography is acquired at any position of the sensor loading ring by holding the mobile mechanism and white light interferometer. The acquired surface topography is reconstructed and the data points are output through the lower computer. We take a cross-section of the three-dimensional surface topography of each loading ring, import the data points into MATLAB, and use the wavelet variation method for noise elimination, based on the structure-function method. Meanwhile, we use the procedure to get the discretized data points of the combined surface and the principle of least squares linear regression of the results of each data point to obtain the fractal parameters and scale parameters. Collecting the surface morphology of different loading rings of the sensor and calculating the fractal dimension and scale parameter of the bonding surface is of great significance for the development of the optimization of the sensor bonding surface at the microscopic level.

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