Mr. Gregor Dornberg Profile

Gregor Dornberg

at Leibniz-Institut für Oberflächenmodifizierung eV

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Publications (3)

Proceedings Article | 12 August 2023 Presentation

Ion-beam-induced nanostructuring on titanium surfaces

Jens Bauer, Hannaneh Hosseini, Gregor Dornberg, Frank Frost

Proceedings Volume PC12622, PC126220R (2023) https://doi.org/10.1117/12.2673111

KEYWORDS: Titanium, Ion beams, Nanostructuring, Ions, Chemical analysis, Crystals, Iron, Biomedical applications, X-ray photoelectron spectroscopy, Silicon

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SPIE Journal Paper | 31 March 2020

Local smoothing of optical aluminum surfaces by reactive ion beam etching

Melanie Ulitschka, Jens Bauer, Gregor Dornberg, Frank Frost, Thomas Arnold

OE, Vol. 59, Issue 03, 035108, (March 2020) https://doi.org/10.1117/12.10.1117/1.OE.59.3.035108

KEYWORDS: Aluminum, Etching, Ion beams, Oxygen, Ions, Reactive ion etching, Oxides, Optics manufacturing, Atomic force microscopy, Spatial frequencies

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SPIE Journal Paper | 24 May 2019 Open Access

Reactive ion beam etching of highly dispersive, high-efficiency transmission gratings for the VIS range

Annemarie Finzel, Felix Koch, Gregor Dornberg, Dennis Lehr, Frank Frost, Tilman Glaser

OE, Vol. 58, Issue 09, 092614, (May 2019) https://doi.org/10.1117/12.10.1117/1.OE.58.9.092614

KEYWORDS: Etching, Diffraction gratings, Ions, Diffraction, Ion beams, Reactive ion etching, Refractive index, Photoresist materials, Silica, Oxygen

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