Dr. Giulio Marti Profile

Dr. Giulio Marti

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Publications (2)

Proceedings Article | 9 April 2024 Presentation + Paper

Process optimization of MP18 semi-damascene interconnects with fully self-aligned vias at sub-2nm nodes

A. Soussou, G. Marti, Zs. Tokei, S. Park, B. Vincent

Proceedings Volume 12958, 1295807 (2024) https://doi.org/10.1117/12.3010814

KEYWORDS: Resistance, Monte Carlo methods, Silicon, Etching, Ruthenium, Manufacturing, Critical dimension metrology, Process modeling, Metals, Fabrication

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Proceedings Article | 1 May 2023 Presentation + Paper

Variability study of MP18 semi-damascene interconnects with fully self-aligned vias

A. Soussou, G. Marti, Zs. Tokei, S. Park, G. Jurczak, B. Vincent

Proceedings Volume 12499, 124990B (2023) https://doi.org/10.1117/12.2658325

KEYWORDS: Resistance, Capacitance, Ruthenium, Process control, Metals, Critical dimension metrology, Etching, Monte Carlo methods, Oxides, Process modeling

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