Mr. Ge Zhang Profile

Ge Zhang

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Publications (1)

Proceedings Article | 23 December 2023 Paper

Influence of absorption distribution in Mo/Si multilayers on 13.5 nm femtosecond laser damage morphologies

Jiahao Li, Yunqi Peng, Yuanan Zhao, Xiangyu Zhu, Ligong Ke, Jiaoling Zhao, Ge Zhang, Kun Shuai, Xuyi Liu, Zhilin Xia, Jianda Shao

Proceedings Volume 12982, 129820U (2023) https://doi.org/10.1117/12.3018263

KEYWORDS: Multilayers, Monte Carlo methods, Extreme ultraviolet, Absorption, Light absorption, Film thickness, Silicon, Femtosecond phenomena, Laser induced damage, Reflection

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