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Fangfang Meng
at Tsinghua Univ
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Author
Publications (3)
SPIE Journal Paper | 5 August 2016
Point-specific self-calibration for improved characterization of thickness distribution
Fangfang Meng, Kun Chen, Tian Zhou, Tao Wu, Haoyun Wei, Yan Li
OE, Vol. 55, Issue 08, 084102, (August 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.8.084102
KEYWORDS: Calibration, Polarizers, Sensors, Ellipsometry, CCD image sensors, Polarization, Charge-coupled devices, Error analysis, Silicon, Optical engineering
SPIE Journal Paper | 13 August 2015
Improved full-field rotating analyzer ellipsometry method for ultrathin film characterization
Fangfang Meng, Yan Li, Xuejian Wu, Kun Chen, Haoyun Wei, Xin Wang
OE, Vol. 54, Issue 08, 084108, (August 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.8.084108
KEYWORDS: Ellipsometry, Polarization, Polarizers, Statistical analysis, Wave plates, CCD cameras, Optical engineering, Error analysis, Refractive index, Charge-coupled devices
Proceedings Article | 13 November 2014 Paper
A 2-dimensionalal thickness measurement ellipsometer based on the the the liquid crystal variable retarder
Proceedings Volume 9276, 92761U (2014) https://doi.org/10.1117/12.2071875
KEYWORDS: Polarization, Ellipsometry, Wave plates, Liquid crystals, Polarizers, Phase shifts, Thin films, Manufacturing, Optics manufacturing, Calibration
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