Dr. Elena Yu Taracheva Profile

Dr. Elena Yu Taracheva

at Fraunhofer IOF

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Publications (1)

Proceedings Article | 28 September 2007 Paper

High-performance multilayer coatings for 106 nm

Elena Taracheva, Sergiy Yulin, Torsten Feigl, Norbert Kaiser

Proceedings Volume 6705, 67050Y (2007) https://doi.org/10.1117/12.735482

KEYWORDS: Reflectivity, Optical coatings, Multilayers, Laser induced fluorescence, Surface roughness, Atomic force microscopy, Silicon, Vacuum ultraviolet, Aluminum, Optical properties

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