Barium strontium titanate, BaxSr1-xTiO3 (BST for short), thin films are grown on the substrates of barium magnesium tantalite, Ba(Mg1/3Ta2/3)O3 (BMT for short), by pulsed laser deposition (PLD) technique. The microstructures and electric properties of Ba(Mg1/3Ta2/3)O3 ceramics and BaxSr1-xTiO3 films are investigated, and the phase shifter is fabricated. Both Ba(Mg1/3Ta2/3)O3 and BaxSr1-xTiO3 have perovskite structure and BMT ceramics has high Q0 at microwave frequency , so BMT substrate is compatible and suitable for BST films. The dielectric constant and dielectric loss of the BST films are 510 and 2% respectively , and about 50% dielectric constant tunability is achieved with an electric field bias of 3v/μm. The dielectric loss of BST films shows no obvious change with the electric fields. About 50° of phase shift has obtained with an electric field bias of 2v/μm at 5GHz .
The nonlinear ceramics BaZrxTi1-xO3 (x equals 0.3,0.35,0.4,0.45,.05) were investigated. The DC bias field was applied to the samples in order to investigate the dielectric constant behavior of these materials. The effects of temperature and frequency on the dielectric constant and dielectric loss were studied as well. The results show that BaZrxTi1-xO3 (x equals 0.35-0.5) materials have strong nonlinearity. In addition, BaZrTi1-xO3 (x equals 0.35- 0.45) materials have suitable dielectric constant and low dielectric low, higher temperature-stability and better high-frequency properties, so that they can be used as the material of phase shifter for phased- array antennas. A phase shifter was fabricated using BaZr0.35Ti0.65O3 ceramics and phase shift angle of about 66 degree at 2.45GHZ is obtained.
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