Chung-Kyung Jung
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 April 2008 Paper
Min Gon Lee, Chung Kyung Jung, Sang Wook Ryu, Kang Hyun Lee, Jae Won Han
Proceedings Volume 6923, 69233U (2008) https://doi.org/10.1117/12.773231
KEYWORDS: Oxides, Plasma, Reactive ion etching, Optical lithography, Etching, Scanning electron microscopy, Polymers, LCDs, Diffractive optical elements, Ions

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