Mr. Christopher J. Smith Profile

Christopher J. Smith

Technical Staff at NXP Semiconductors

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Publications (2)

Proceedings Article | 30 July 2002 Paper

Integration of new alignment mark designs in dual inlaid-copper interconnect processes

Scott Warrick, Paul Hinnen, Richard van Haren, Chris Smith, Henry Megens, Chong-Cheng Fu

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474476

KEYWORDS: Optical alignment, Semiconducting wafers, Overlay metrology, Copper, Dielectrics, Scanning probe microscopy, Signal processing, Reflectivity, Polishing, Metals

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Proceedings Article | 14 September 2001 Paper

Evaluating device design rules based on lithographic capability

Scott Warrick, Chris Smith, Matt Monroe, Carroll Casteel, Mark Zaleski

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435792

KEYWORDS: Overlay metrology, Critical dimension metrology, Reticles, Process control, Semiconducting wafers, Lithography, Optical alignment, Error analysis, Tolerancing, Manufacturing

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