Electron beam based Projection Mask-Less Lithography (PML2) is one of the promising candidates for fast chip devel-opment and prototyping as well as for small and medium volume device production for the 45nm technology node and beyond. The concept of the PML2 proof-of-concept tool comprises a single electron optical column, a multi beam blank-ing device (programmable "Aperture Plate System") including high speed optical data path and a scanning 300mm wa-fer stage. More than 290.000 beams will be projected onto the wafer used for a highly redundant scanning stripe expo-sure process. The PML2 proof-of-concept tool will be built as part of the European MEDEA+ project T409 and the joint project "Ab-bildungsmethodiken fur nanoelektronische Bauelemente-ABBILD" in Germany. To show the feasibility of PML2 key modules in an early stage several demonstrators and test stands have been developed. In this paper demonstration setups and first results of the electron optics modeling, gun prototype, Aperture Plate System and the Optical Data Path are pre-sented.
Electron beam based Projection Mask-Less Lithography (PML2) is one of the promising candidates for small and medium volume device production for the 45nm technology node and beyond. The concept of the PML2 proof-of-concept tool, to be realized as part of the European MEDEA+ project T409, comprises a single electron optical column, a multi beam blanking device (programmable "Aperture Plate System") including high speed optical data path and a scanning 300mm wafer stage. More than 250.000 beams will be projected onto the wafer used for a highly redundant scanning stripe exposure process.
A demonstrator chip of the Aperture Plate System is being manufactured with > 1000 apertures of 5μm x 5μm size using standard MST processes. Results as achieved with this demonstrator chip using a specifically designed e-beam test bench are shown.
Furthermore, the realtime data transmission concept is discussed, showing that with the selected technology the required data rates for the PML2 proof-of-concept tool can be delivered, with extendibility beyond. Viability of the optical data pattern transfer to the Aperture Plate System is shown using a test setup of the parallel high-speed transmission lines.
Recent studies have shown the feasibility of Projection Mask-Less Lithography (PML2) for small and medium volume device production (2-5 WPH) for the 45nm technology node. This PML2 tool concept comprises a combined electrostatic-magnetic electron optical column with 200x de-magnification factor. Instead of a mask there is a programmable aperture plate enabling dynamic beam structuring. Wafer exposure is done stripe-by-stripe with a scanning 300mm wafer stage. Detailed calculations of the PML2 optical column (2-step demagnification) including Monte-Carlo simulations of Coulomb interactions are presented. The extendibility of PML2 technology for the 32nm node will be discussed.
Guenther Leising, Emil List, Christian Zenz, Stefan Tasch, Christoph Brandstaetter, Wilhelm Graupner, Peter Markart, Farideh Meghdadi, Gerald Kranzelbinder, Arnold Niko, Roland Resel, Egbert Zojer, P. Schlichting, U. Rohr, Y. Geerts, Ullrich Scherf, Klaus Muellen, Ryan Smith, Douglas Gin
We demonstrate the fabrication and characterization of highly efficient red-green-blue (RGB) and white light emitting devices based on poly(phenylene) type materials as the hexaphenyl and the methyl substituted laddertype poly(para phenylene) (m-LPPP). The RGB-devices are fabricated with an external color conversion technique based on PHP, whereas the white light emission is generated by an internal excitation energy transfer from the blue m-LPPP component to a red light-emitting polymer in a polymer blend, which is used as the active layer in a light-emitting diode. We present photophysical properties, like spectral line-shape site selectivity of photoluminescence (PL), and electroluminescence of bulk poly(para-phenylenevinylene) PPV films and isolated PPV chains incorporated into a self- assembled matrix material, which leads to the formation of a regular hexagonal array of channels with a diameter of about 15 angstrom, in which the conjugated polymer chains are contained. The structure of the nano-composite in organic- light-emitting-diodes. A suitably structured m-LPPP waveguide shows a spectrally very narrow high directional blue-green light output when optically pumped. The high optical gain of m-LPPP is a results of the spectral separation of stimulated emission and photoinduced absorption bands, thus spectral narrowing is even observable in below cut-off waveguides. Under resonant excitation conditions, we observe strong stimulated Raman scattering.
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