Dr. Chisun Hong Profile

Dr. Chisun Hong

at FUJIFILM Electronic Materials USA Inc

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Author

Publications (3)

Proceedings Article | 20 March 2012 Paper

KrF resists for implant layers patterning extreme high-aspect ratio structures with a double focal plane exposure technique

Giorgio Rafaelli, Fabio Ferri, Stefano Volpi, Chisun Hong

Proceedings Volume 8325, 83252D (2012) https://doi.org/10.1117/12.918015

KEYWORDS: Optical lithography, Scanning electron microscopy, Transparency, Photoresist processing, Image sensors, Diffusion, Photoresist materials, Charge-coupled devices, CMOS sensors, Semiconducting wafers

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Proceedings Article | 4 May 2005 Paper

Effect of hard bake process on LER

Munirathna Padmanaban, David Rentkiewicz, SangHo Lee, Chisun Hong, Dongkwan Lee, Dalil Rahman, Raj Sakamuri, Ralph Dammel

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.604401

KEYWORDS: Line edge roughness, Photoresist processing, Polymers, Line width roughness, Semiconducting wafers, Critical dimension metrology, Cadmium, Chemically amplified resists, Transistors, Optical lithography

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Proceedings Article | 14 May 2004 Paper

PEB sensitivity studies of ArF resists: II. Polymer and solvent effects

Chi-Sun Hong, Sang-Ho Lee, Woo-Kyu Kim, Takanori Kudo, Allen Timko, Douglas Mckenzie, Clement Anyadiegwu, Dalil Rahman, Guanyang Lin, Ralph Dammel, Munirathna Padmanaban

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.537931

KEYWORDS: Polymers, Critical dimension metrology, Photoresist processing, Etching, Resistance, Lithography, Semiconducting wafers, Resist chemistry, Line edge roughness, Dry etching

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