The modern industry has higher precision demand for micro-angle measurement, the measurement methods and measurement techniques are constantly progressing. A micro-angle measurement method based on the interference imaging principle of F-P etalon was proposed, and the micro-angle measurement can be achieved in conjunction with an effective data processing technique. This paper performs error analysis and experimental study on the measurement system. Theory analyzes the effect of temperature change, nonlinearity of focal length calculation model, focusing error, and F-P etalon interval on micro-angle measurement results, and proposes possible solutions. A micro-angle measurement experiment with different F-P etalon intervals (2 mm, 3 mm, 5 mm) were performed using existing experimental devices. The experimental results show that the uncertainty of the micro-angle measurement results at interval d = 3 mm is optimal; under the current test conditions, the angle measurement uncertainty in the 300" measurement range is not greater than 0.08".
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.