Mr. Chen-Yang Lin Profile

Chen-Yang Lin

at TSMC Taiwan

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Proceedings Article | 18 December 2015 Paper

Key indexes of the effectiveness of mask surface treatments

Chen-Yang Lin, Chung-Hsuan Liu, Kuan-Wen Lin, Chi-Lun Lu, Luke Hsu, Angus Chin, Anthony Yen

Proceedings Volume 9635, 963519 (2015) https://doi.org/10.1117/12.2197675

KEYWORDS: Chromium, Ruthenium, Particles, Digital watermarking, Plasma, Photomasks, Oxygen, Extreme ultraviolet, Inspection, Quartz

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A proper surface treatment, such as O2 plasma, helps to improve particle removal efficiency (PRE) because of the formation of hydrogen bonding between particles, water and the mask surface after treatment. The effectiveness of surface treatments cannot be determined only by the static wettability after processes. More key indexes should be considered. In this paper, we report our findings on the relationship between surface treatments on photomasks and the resulting wettability. In addition, added defects after the treatment and the cleaning process were inspected with a 193- nm KLA inspector on 193-nm immersion and EUV photomasks, which consist of SiO₂, MoSi, Cr, Ta-based absorber and Ru. Based on our work, three indexes can be built for determining the effectiveness of surface treatments. The first is to check whether the surface becomes super-hydrophilic after treatment. The second is to determine the efficiency of surface treatments on enhancing wettability. The last is to quantify the added watermark count after the surface treatment and the cleaning process. With a proper surface treatment, watermarks can be greatly eased. These three indexes can quickly determine possible effective methods for treating the surfaces of different materials.

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