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Atsuro Nakano
at Osaka Univ
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Publications (1)
Proceedings Article | 4 May 2005 Paper
Deprotonation mechanism of poly(4-hydroxystyrene) and its derivative
Atsuro Nakano, Kazumasa Okamoto, Yukio Yamamoto, Takahiro Kozawa, Seiichi Tagawa, Toshiyuki Kai, Hiroaki Nemoto, Tsutomu Shimokawa
Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.596827
KEYWORDS: Phase modulation, Absorption, Polymers, Image processing, Bioalcohols, Ionizing radiation, Ionization, Electron beams, Absorbance, Chemically amplified resists
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