Dr. Arun Kumar Gnanappa Profile

Dr. Arun Kumar Gnanappa

at Institute of Microelectronics

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 5 April 2011 Paper

Improved immersion scanning speed using superhydrophobic surfaces

Arun Kumar Gnanappa, Evangelos Gogolides, Emilien Feuillet, Fabrizio Evangelista, Nina Dziomkina, Michel Riepen

Proceedings Volume 7973, 79732C (2011) https://doi.org/10.1117/12.881605

KEYWORDS: Semiconducting wafers, Polymethylmethacrylate, Liquids, Water, Satellites, Plasma, Capillaries, Immersion lithography, Thin films, Oxygen

Read Abstract +

Failure of the receding meniscus during immersion lithography is one of the well known problems. A thin liquid film left behind on the wafer during scanning may generate imaging defects. Liquid loss occurs at the receding meniscus when the smooth substrate is accelerated beyond a critical velocity of approximately 1 m/s. Nanotexturing the surface with average roughness values even below 10 nm results in critical velocity larger than 2.5 m/s, the upper limit of our apparatus. This unexpected increase in critical velocity is observed for both sticky rough hydrophobic and slippery superhydrophobic surfaces. We attribute this large increase in critical velocity to the increased static receding contact angle, air extraction and in increased slip length for such nanotextured surfaces. We have also presented the experimental proof of the hypothesis which shows that the slip length and static receding contact angle as a significant parameters for the enhanced performance of sticky surface. Further the dynamic contact line behavior on surface with regions of varying wetting behaviour was studied. The preliminary result shows that the water droplet retains its meniscus shape as soon as it transits from hydrophobic to superhydrophobic region. The secondary thin streak of entrained water on the hydrophobic region is formed which can be controlled with higher extraction.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years