Dr. Anwei Liu Profile

Dr. Anwei Liu

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Publications (3)

Proceedings Article | 23 September 2009 Paper

Model-based assist features

Bayram Yenikaya, Oleg Alexandrov, Yongjun Kwon, Anwei Liu, Ali Mokhberi, Apo Sezginer

Proceedings Volume 7488, 748815 (2009) https://doi.org/10.1117/12.829938

KEYWORDS: SRAF, Photomasks, Model-based design, Optimization (mathematics), Printing, Semiconducting wafers, Systems modeling, Resolution enhancement technologies, Optical proximity correction, Alternate lighting of surfaces

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Proceedings Article | 11 May 2009 Paper

Model-based assist features

Bayram Yenikaya, Oleg Alexandrov, Steven Chen, Anwei Liu, Ali Mokhberi, Apo Sezginer

Proceedings Volume 7379, 73792Z (2009) https://doi.org/10.1117/12.824350

KEYWORDS: SRAF, Photomasks, Model-based design, Lithography, Printing, Optimization (mathematics), Electroluminescence, Critical dimension metrology, Lithographic illumination, Systems modeling

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Proceedings Article | 30 October 2007 Paper

Polygon-based compensation of proximity and density effects in photomask processes

Kiyoshi Kageyama, Katsuyuki Miyoko, Yoshimitsu Okuda, Gökhan Perçin, Apo Sezginer, Jesus Carrero, Alan Zhu, Anwei Liu

Proceedings Volume 6730, 67302Y (2007) https://doi.org/10.1117/12.746796

KEYWORDS: Photomasks, Databases, Calibration, Process modeling, Critical dimension metrology, Data modeling, Semiconducting wafers, Glasses, Etching, Model-based design

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