Mr. Amir Borna Profile

Amir Borna

at Univ of Michigan

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 5 May 2005 Paper

Correlation analysis of CD-variation and circuit performance under multiple sources of variability

Amir Borna, Chris Progler, David Blaauw

Proceedings Volume 5756, (2005) https://doi.org/10.1117/12.604606

KEYWORDS: Critical dimension metrology, Transistors, Lithography, Optical proximity correction, Device simulation, Silicon, Image processing, Cadmium, Photomasks, Computer aided design

Read Abstract +

Proceedings Article | 3 May 2004 Paper

Impact of lithography variability on statistical timing behavior

Christopher Progler, Amir Borna, David Blaauw, Pierre Sixt

Proceedings Volume 5379, (2004) https://doi.org/10.1117/12.537259

KEYWORDS: Lithography, Critical dimension metrology, Monte Carlo methods, Error analysis, Optical proximity correction, Photomasks, Statistical analysis, Tolerancing, Manufacturing, Device simulation

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years