Dr. Ahmad K. Fumani Profile

Dr. Ahmad K. Fumani

at Nanometrics Inc

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Author

Publications (3)

SPIE Journal Paper | 4 April 2022

Decorrelation of optical critical dimensions in mid-infrared ellipsometric spectroscopy of high aspect ratio etch profiles

Ahmad Fumani, Bin Yan, Nick Keller, G. Andrew Antonelli, Troy Ribaudo

JM3, Vol. 21, Issue 02, 021205, (April 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.021205

KEYWORDS: Mid-IR, Etching, Critical dimension metrology, Silicon, Spectroscopy, Finite-difference time-domain method, Superlattices, Absorption, Refractive index, Polarization

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Proceedings Article | 22 February 2021 Presentation + Paper

Ellipsometric critical dimension metrology employing mid-infrared wavelengths for high-aspect-ratio channel hole module etch processes

G. Andrew Antonelli, Nick Keller, Troy Ribaudo, Franklin Wong, Wenmei Ming, Hepeng Ding, Zhuo Chen, Ross Grynko, Ahmad Fumani, Zhuan Liu, Sadao Takabayashi, John Hauck, Joshua Frederick, Dan Engelhard, Bo Hui Ng, Biow Hiem Ong, Luey Chwan Liong

Proceedings Volume 11611, 116111O (2021) https://doi.org/10.1117/12.2583786

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Proceedings Article | 28 August 2014 Paper

Room-temperature initialization, dynamics, and measurement of coherent electron spins in strongly confined quantum dots

Jesse Berezovsky, Ahmad Fumani, Michael Wolf

Proceedings Volume 9167, 916707 (2014) https://doi.org/10.1117/12.2063646

KEYWORDS: Absorption, Oscillators, Quantum dots, Spherical lenses, Neodymium, Physics, Quantum physics, Luminescence, Temperature metrology, Electroluminescent displays

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