24 February 2021 On-machine measurement method for micro-structured surface by integral imaging with workpiece rotating technique
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Abstract

To measure large and heavy micro-structured workpieces in situ and improve the measurement accuracy, which strongly depends on the environment during the measurement of micro-structured surfaces, a workpiece rotating technique is proposed. This method utilizes the precise rotation of machine tools to drive the workpiece and records a set of elemental image arrays for the pickup stage to overcome the upper-resolution limit imposed by the Nyquist sampling theorem, which allows the increase in the two-dimensional spatial resolution of the computed depth images in integral imaging. By extracting the depth position, we can obtain accurate depth information and measurement results for micro-structured surfaces. We carried out simulations and experiments to demonstrate the proposed method, and the results show the feasibility of our method.

© 2021 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2021/$28.00 © 2021 SPIE
Weihao Wang, Xing Zhao, Xuewei Zhao, Lipei Song, Weiwei Liu, and Yaoyao Wang "On-machine measurement method for micro-structured surface by integral imaging with workpiece rotating technique," Optical Engineering 60(5), 051210 (24 February 2021). https://doi.org/10.1117/1.OE.60.5.051210
Received: 23 September 2020; Accepted: 3 February 2021; Published: 24 February 2021
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KEYWORDS
3D image reconstruction

Integral imaging

Image quality

Reconstruction algorithms

3D metrology

3D image processing

Image processing

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