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14 December 2020 Form deviations caused by lateral displacement errors in annular subaperture stitching interferometry
Markus Schake, Jörg Riebeling, Gerd Ehret
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Abstract

Annular subaperture stitching interferometry (ASSI) is a common approach for the measurement of aspherical surfaces. A common obstacle of ASSI is the occurrence of lateral displacement errors when the sensor or specimen is repositioned between the subaperture measurements. Our contribution focuses on modeling of the statistical displacement errors. A virtual experiment is presented simulating the propagation of the displacement errors through a cumulative and a global stitching algorithm to the retrieved surface form. For the considered experimental setup, the uncertainty in lateral position depends on the positioning uncertainties of the employed motion system and the uncertainty in the absolute distance measurement between the sensor and specimen. The lateral displacement uncertainty is determined experimentally employing a calibratable lateral grating. Thus, it is traceable to the SI unit of the length (meter). The experimental results show that the lateral displacement errors may be modeled by a normal distribution, and the results of the virtual experiment indicate that the statistical lateral displacement errors transfer linear through the stitching procedure and also cause a normal distributed topography error. This enables the assignment of an expanded uncertainty to each individual sample point employing the Zernike polynomial expression of the topography measurement.

CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
Markus Schake, Jörg Riebeling, and Gerd Ehret "Form deviations caused by lateral displacement errors in annular subaperture stitching interferometry," Optical Engineering 59(12), 124105 (14 December 2020). https://doi.org/10.1117/1.OE.59.12.124105
Received: 1 October 2020; Accepted: 30 November 2020; Published: 14 December 2020
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Cited by 1 scholarly publication.
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KEYWORDS
Error analysis

Sensors

Calibration

Statistical analysis

Zernike polynomials

Interferometry

Interferometers

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