18 May 2020 Improvement and coordination of spectral and mechanical properties of bandpass filter on silicon substrate for the infrared range
Xiaoxi Tian, Shengming Xiong, Kepeng Zhang
Author Affiliations +
Abstract

Infrared (IR) film systems can accumulate considerable stress due to their large thickness. In addition, the thermal stress of the films will further increase due to a significant difference in thermal expansion coefficient between the film materials and the substrate. Stress accumulation limits the passband transmittance of the 2.76 to 3.04  μm traditional IR interference filter to about 80%. To increase the passband transmittance and guarantee the mechanical properties, four kinds of samples were designed, prepared, and measured. Through matching the film systems and proposing an alternative deposition method, high-performance IR bandpass filters with an average transmittance of 92.2% have been prepared. The improved transmittance provides a necessary study of developing IR systems and improving imaging quality.

© 2020 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2020/$28.00 © 2020 SPIE
Xiaoxi Tian, Shengming Xiong, and Kepeng Zhang "Improvement and coordination of spectral and mechanical properties of bandpass filter on silicon substrate for the infrared range," Optical Engineering 59(5), 055106 (18 May 2020). https://doi.org/10.1117/1.OE.59.5.055106
Received: 25 November 2019; Accepted: 5 May 2020; Published: 18 May 2020
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Transmittance

Bandpass filters

Deposition processes

Germanium

Infrared imaging

Infrared telescopes

Silicon

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