Optimization of pencil beam f-theta lens for high-accuracy metrology

Chuanqian Peng; Yumei He; Jie Wang

doi:10.1117/1.OE.57.1.015101

3 January 2018 Optimization of pencil beam f-theta lens for high-accuracy metrology

Chuanqian Peng, Yumei He, Jie Wang

Author Affiliations +

Optical Engineering, Vol. 57, Issue 1, 015101 (January 2018). https://doi.org/10.1117/1.OE.57.1.015101

Abstract

Pencil beam deflectometric profilers are common instruments for high-accuracy surface slope metrology of x-ray mirrors in synchrotron facilities. An f-theta optical system is a key optical component of the deflectometric profilers and is used to perform the linear angle-to-position conversion. Traditional optimization procedures of the f-theta systems are not directly related to the angle-to-position conversion relation and are performed with stops of large size and a fixed working distance, which means they may not be suitable for the design of f-theta systems working with a small-sized pencil beam within a working distance range for ultra-high-accuracy metrology. If an f-theta system is not well-designed, aberrations of the f-theta system will introduce many systematic errors into the measurement. A least-squares’ fitting procedure was used to optimize the configuration parameters of an f-theta system. Simulations using ZEMAX software showed that the optimized f-theta system significantly suppressed the angle-to-position conversion errors caused by aberrations. Any pencil-beam f-theta optical system can be optimized with the help of this optimization method.

Citation Download Citation

Chuanqian Peng, Yumei He, and Jie Wang "Optimization of pencil beam f-theta lens for high-accuracy metrology," Optical Engineering 57(1), 015101 (3 January 2018). https://doi.org/10.1117/1.OE.57.1.015101

Received: 26 September 2017; Accepted: 11 December 2017; Published: 3 January 2018

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available