Nanoscale measurement of in-plane and out-of-plane displacements of microscopic object by sensor fusion

Alok Kumar Singh; Giancarlo Pedrini; Xiang Peng; Wolfgang Osten

doi:10.1117/1.OE.55.12.121722

8 August 2016 Nanoscale measurement of in-plane and out-of-plane displacements of microscopic object by sensor fusion

Alok Kumar Singh, Giancarlo Pedrini, Xiang Peng, Wolfgang Osten

Author Affiliations +

Optical Engineering, Vol. 55, Issue 12, 121722 (August 2016). https://doi.org/10.1117/1.OE.55.12.121722

Abstract

Different methods for the measurement of in-plane and out-of-plane nanodisplacements of microscopic samples are discussed and compared. It is shown that correlation methods are suited for in-plane displacement measurements and can achieve accuracies of a few nanometers. The method based on vortices tracking can be used for in-plane displacement measurements, but its accuracy is lower compared with the intensity correlation method. The holographic methods allow the measurement of in-plane and out-of-plane displacements at the same time; but in this case, a quite complex setup is required. A combination of correlation methods for in-plane measurement and digital holography for out-of-plane plane measurements is also discussed. The accuracy of the different methods was determined by comparison with a calibrated reference.

Citation Download Citation

Alok Kumar Singh, Giancarlo Pedrini, Xiang Peng, and Wolfgang Osten "Nanoscale measurement of in-plane and out-of-plane displacements of microscopic object by sensor fusion," Optical Engineering 55(12), 121722 (8 August 2016). https://doi.org/10.1117/1.OE.55.12.121722

Published: 8 August 2016

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