Diamond turning of high-precision roll-to-roll imprinting molds for fabricating subwavelength gratings

Chun-Wei Liu; Jiwang Yan; Shih-Chieh Lin

doi:10.1117/1.OE.55.6.064105

8 June 2016 Diamond turning of high-precision roll-to-roll imprinting molds for fabricating subwavelength gratings

Chun-Wei Liu, Jiwang Yan, Shih-Chieh Lin

Author Affiliations +

Optical Engineering, Vol. 55, Issue 6, 064105 (June 2016). https://doi.org/10.1117/1.OE.55.6.064105

Abstract

Diamond turning of high-precision molds is a vital process for the roll-to-roll-based ultraviolet resin imprinting process in fabricating subwavelength gratings. The effects of the grating shape and grating period on diffraction efficiencies and diffraction angles were simulated. Experiments were then conducted to examine the effects of shape design, grating period, and cutting speed on machinability of the mold. According to the optical measurement results, the performance of the subwavelength gratings matched the design well at various incident angles. The results confirm that diamond turning of high-precision molds is a feasible approach for ensuring the continual mass production of subwavelength gratings.

Citation Download Citation

Chun-Wei Liu, Jiwang Yan, and Shih-Chieh Lin "Diamond turning of high-precision roll-to-roll imprinting molds for fabricating subwavelength gratings," Optical Engineering 55(6), 064105 (8 June 2016). https://doi.org/10.1117/1.OE.55.6.064105

Published: 8 June 2016

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