Optical surface evaluation by correlating bi-Ronchigram images

Alberto Cordero Dávila; Jorge González García

doi:10.1117/1.OE.54.3.034108

16 March 2015 Optical surface evaluation by correlating bi-Ronchigram images

Alberto Cordero Dávila, Jorge González García

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Optical Engineering, Vol. 54, Issue 3, 034108 (March 2015). https://doi.org/10.1117/1.OE.54.3.034108

Abstract

By correlating bi-Ronchigram images, surface errors without any supposed symmetry are evaluated. No approximation and interference orders are needed. First, only one experimental bi-Ronchigram (Ronchigram with a square grid) image was recorded. Second, given a surface parameter set (curvature radius, conic constant, and/or symmetric and asymmetric deformation coefficients), a bi-Ronchigram image is simulated and correlated with the bi-Ronchigram experimental image. Third, genetic algorithms are used to find the parameters for which the correlation coefficient reaches its maximum value. Finally, the parameters of the experimental surface are estimated. Evaluations of curvature radius, conic constant, and error functions for reflecting surfaces will be shown.

CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Alberto Cordero Dávila and Jorge González García "Optical surface evaluation by correlating bi-Ronchigram images," Optical Engineering 54(3), 034108 (16 March 2015). https://doi.org/10.1117/1.OE.54.3.034108

Published: 16 March 2015

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