Multistep-shaping control based on the static and dynamic behavior of nonlinear optical torsional micromirror

Cheng Bai; Jin Huang

doi:10.1117/1.OE.53.5.057109

28 May 2014 Multistep-shaping control based on the static and dynamic behavior of nonlinear optical torsional micromirror

Cheng Bai, Jin Huang

Author Affiliations +

Optical Engineering, Vol. 53, Issue 5, 057109 (May 2014). https://doi.org/10.1117/1.OE.53.5.057109

Abstract

Electrostatically driven torsional micromirrors are suitable for optical microelectromechanical systems due to their good dynamic response, low adhesion, and simple structure for large-scale-integrated applications. For these devices, how to eliminate the excessive residual vibration in order to achieve more accurate positioning and faster switching is an important research topic. Because of the known nonlinearity issues, traditional shaping techniques based on linear theories are not suitable for nonlinear torsional micromirrors. In addition, due to the difficulties in calculating energy dissipation, the existing nonlinear command shaping techniques using energy method have neglected the effect of damping. We analyze the static and dynamic behavior of the electrostatically actuated torsional micromirrors. Based on the response of these devices, a multistep-shaping control considering the damping effects and the nonlinearity is proposed. Compared to the conventional closed-loop control, the proposed multistep-shaping control is a feedforward approach which can yield a good enough performance without extra sensors and actuators. Simulation results show that, without changing the system structure, the preshaping input reduces the settling time from 4.3 to 0.97 ms, and the overshoot percentage of the mirror response is decreased from 33.2% to 0.2%.

Citation Download Citation

Cheng Bai and Jin Huang "Multistep-shaping control based on the static and dynamic behavior of nonlinear optical torsional micromirror," Optical Engineering 53(5), 057109 (28 May 2014). https://doi.org/10.1117/1.OE.53.5.057109

Published: 28 May 2014

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available