Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics

Jianqiang Ma; Ying Liu; Yanlei Hu; Chen Xu; Baoqing Li; Jiaru Chu

doi:10.1117/1.OE.52.1.016602

7 January 2013 Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics

Jianqiang Ma, Ying Liu, Yanlei Hu, Chen Xu, Baoqing Li, Jiaru Chu

Author Affiliations +

Funded by: National Basic Research Program of China, Fundamental Research Funds for the Central Universities

Optical Engineering, Vol. 52, Issue 1, 016602 (January 2013). https://doi.org/10.1117/1.OE.52.1.016602

Abstract

This paper presents a low-cost silicon unimorph deformable mirror (DM) that will be used for astronomical adaptive optics. The device has a simple construction consisting of a 400-μm-thick silicon wafer and a 200-μm-thick lead zirconate titanate film, with 214 actuators and 50-mm active aperture. The actuator displacement of the fabricated device is about 1 μm at 50 V. And the resonance frequency is 550 Hz. The simulation and experimental generation of Zernike mode shapes indicate that the fabricated DM has an excellent correction performance for both low order and high order aberrations.

Citation Download Citation

Jianqiang Ma, Ying Liu, Yanlei Hu, Chen Xu, Baoqing Li, and Jiaru Chu "Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics," Optical Engineering 52(1), 016602 (7 January 2013). https://doi.org/10.1117/1.OE.52.1.016602

Published: 7 January 2013

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