Design realization and characterization of a position sensitive detector for fast optical measurement

Xun Jun Qu; Bin Lin; Dongyan Chen; Xiangqun Cao; Yu Qing Chen

doi:10.1117/1.2151807

1 January 2006 Design realization and characterization of a position sensitive detector for fast optical measurement

Xun Jun Qu, Bin Lin, Dongyan Chen, Xiangqun Cao, Yu Qing Chen

Author Affiliations +

Optical Engineering, Vol. 45, Issue 1, 014402 (January 2006). https://doi.org/10.1117/1.2151807

Abstract

The fabrication and testing results of a 65-pin ceramic packaged 4×4 arrayed position sensitive detector are presented. The detector, consisting of 16 tetra-lateral sensitive areas, is a p-n-n+ configuration made on 3-in. <111> n-type high resistance crystal silicon substrates. A 100-nm antireflection SiO₂ thin film is formed on the surface, along with a multilayer cover glass with transmissivity >98% from 400 to 950 nm. Primary tests of the device show that it has a low dark current, high spectral sensitivity, very fast response speed, and very good linearity. The dark current of an element unit is less than 20 nA, which is the allowable maximum dark current. The peak spectral sensitivity of the sensor is over 505 mA/W at 800-nm wavelength. Its response time is 8 ns at 45-V reverse bias and the nonlinearity of the total sensitive area is less than 1%.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Xun Jun Qu, Bin Lin, Dongyan Chen, Xiangqun Cao, and Yu Qing Chen "Design realization and characterization of a position sensitive detector for fast optical measurement," Optical Engineering 45(1), 014402 (1 January 2006). https://doi.org/10.1117/1.2151807

Published: 1 January 2006

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