Digital microholointerferometer: development and validation

Lei Xu; Xiaoyuan Peng; Anand Krishna Asundi; Jianmin Miao

doi:10.1117/1.1589026

1 August 2003 Digital microholointerferometer: development and validation

Lei Xu, Xiaoyuan Peng, Anand Krishna Asundi, Jianmin Miao

Optical Engineering, Vol. 42, Issue 8, (August 2003). https://doi.org/10.1117/1.1589026

The development of an in-line digital microholointerferometer for micromechanical testing is presented. With respect to the specific requirements on the microscopic scheme in micromeasurement, the application of a long-distance microscope is introduced with emphasis. A critical issue, validation of the developed system, is addressed. Aided by finite element analysis and analytical calculation, experimental measurement with the system is examined using a hybrid approach. To evaluate the performance of the system, a microbeam experiment is presented. Results measured with the system, as well as the numerical simulations, are obtained. Quantitative comparisons are carried out in terms of load-induced variations of the test sample, based on which the conclusions are given.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Lei Xu, Xiaoyuan Peng, Anand Krishna Asundi, and Jianmin Miao "Digital microholointerferometer: development and validation," Optical Engineering 42(8), (1 August 2003). https://doi.org/10.1117/1.1589026

Published: 1 August 2003

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