Touchless interferometric dimension comparator

Marek Dobosz; Hirokazu Matsumoto; Shige Iwasaki

doi:10.1117/1.600920

1 February 1996 Touchless interferometric dimension comparator

Marek Dobosz, Hirokazu Matsumoto, Shige Iwasaki

Optical Engineering, Vol. 35, Issue 2, (February 1996). https://doi.org/10.1117/1.600920

A touchless interference method that can be used to calibrate gauge blocks or length bars with lengths from 0.01 mm up to 1 m is proposed. The method is based on a comparison of two gauges, with one of them used as a reference. Polychromatic synthesized light from three laser diodes is used to determine end surface positions. Distances referring to these positions are measured by a wavelength-stabilizedlaser interferometer. Error sources are analyzed in this method. The accuracy of the comparison depends on the accuracy of the interferometer used to measure displacement. In the case of long gauge blocks, accuracy is limited mainly by uncertainty in the gauge block temperature.

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Marek Dobosz, Hirokazu Matsumoto, and Shige Iwasaki "Touchless interferometric dimension comparator," Optical Engineering 35(2), (1 February 1996). https://doi.org/10.1117/1.600920

Published: 1 February 1996

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