Interferometry On Grazing Incidence Optics

Joseph M. Geary; Riki Maeda

doi:10.1117/12.7977159

1 December 1987 Interferometry On Grazing Incidence Optics

Joseph M. Geary, Riki Maeda

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Optical Engineering, Vol. 26, Issue 12, 261225 (December 1987). https://doi.org/10.1117/12.7977159

Abstract

An interferometric procedure is described that shows potential for obtaining surface figure error maps of grazing incidence optics at normal incidence. Such optics are found in some laser resonator configurations and in Wolter-type x-ray optics. The procedure makes use of cylindrical wavefronts and error subtraction techniques over subapertures. The surface error maps obtained will provide critical information to opticians for the fabrication process.

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Joseph M. Geary and Riki Maeda "Interferometry On Grazing Incidence Optics," Optical Engineering 26(12), 261225 (1 December 1987). https://doi.org/10.1117/12.7977159

Published: 1 December 1987

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