1 August 1984 Absolute Calibration Of An Optical Flat
Bernard S. Fritz
Author Affiliations +
Abstract
A method for the absolute calibration of a flat optical surface is described. An algorithm which utilizes the orthogonal properties of the Zernike polynomials was used on interferometric data to fabricate and certify three 10-inch Zerodur reference flats to X/100 peak-to-valley quality.
Bernard S. Fritz "Absolute Calibration Of An Optical Flat," Optical Engineering 23(4), 234379 (1 August 1984). https://doi.org/10.1117/12.7973304
Published: 1 August 1984
Lens.org Logo
CITATIONS
Cited by 127 scholarly publications and 6 patents.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Calibration

Optical calibration

Interferometry

Zernike polynomials

Zerodur

Back to Top