Comparison of three ANSYS finite element tools for analysis of MEMS micromirrors

R. Jafari; Andrew G. Kirk

doi:10.1117/1.2804103

1 October 2007 Comparison of three ANSYS finite element tools for analysis of MEMS micromirrors

R. Jafari, Andrew G. Kirk

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 6, Issue 4, 043011 (October 2007). https://doi.org/10.1117/1.2804103

Abstract

Finite element (FE) modeling of electrostatically actuated torsional and flexural-torsional microelectromechanical systems (MEMS) micromirrors is investigated by means of three different tools available in ANSYS FE modeling software, and numerical results are compared with static analytical solutions and existing experimental data. These methods include (a) a sequential coupled electrostatic and structural field tool, (b) a directly coupled electrostatic and structural field tool employing one-dimensional transducer element, and (c) a directly coupled electrostatic and structural field tool utilizing a two- or three-dimensional reduced order model. The torsional micromirror is 1000×250 μm², and the flexural-torsional micromirror is 100×100 μm². We present the advantages and disadvantages of these tools for MEMS micromirror modeling. These comparisons allow a selection to be made of the most suitable tool for a given modeling task and assess the accuracy of analytical solutions.

©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

R. Jafari and Andrew G. Kirk "Comparison of three ANSYS finite element tools for analysis of MEMS micromirrors," Journal of Micro/Nanolithography, MEMS, and MOEMS 6(4), 043011 (1 October 2007). https://doi.org/10.1117/1.2804103

Published: 1 October 2007

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