Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications

Elnaz Afsharipour; Ramin Soltanzadeh; Byoungyoul Park; Dwayne Chrusch; Cyrus Shafai

doi:10.1117/1.JMM.18.1.015001

14 January 2019 Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications

Elnaz Afsharipour, Ramin Soltanzadeh, Byoungyoul Park, Dwayne Chrusch, Cyrus Shafai

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 18, Issue 1, 015001 (January 2019). https://doi.org/10.1117/1.JMM.18.1.015001

Abstract

A low-power three-degree-of-freedom scanning micromirror is presented. The 2- × 2-mm mirror is a gimbaless structure, directly supported by single-crystal microsprings. It is actuated by Lorentz force and is able to tilt about two axes and has linear motion in a third-axis. The transient and frequency responses of the micromirror are analyzed. The Lagrange’s equations of motions describing the dynamic behavior of the system are presented and show a good agreement with the experimental results. The fabricated microelectromechanical system mirror demonstrates a tilt angle of 22.8 deg at 247.5 Hz about y-axis, and 13.3 deg at 292.7 Hz about x-axis, in a 0.1 T magnetic field and 20-mA current on the mirror. Power consumption is 2.6 mW of power in tilting motions in resonant operation. With a total DC-drive current of 110 mA, 232-μm linear motion is achieved.

Citation Download Citation

Elnaz Afsharipour, Ramin Soltanzadeh, Byoungyoul Park, Dwayne Chrusch, and Cyrus Shafai "Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications," Journal of Micro/Nanolithography, MEMS, and MOEMS 18(1), 015001 (14 January 2019). https://doi.org/10.1117/1.JMM.18.1.015001

Received: 18 September 2018; Accepted: 14 December 2018; Published: 14 January 2019

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